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A laterally excited bulk acoustic resonator with scattering vias in electrodes

Applied Physics Letters, 2023
Laterally excited bulk acoustic resonators (XBARs) using interdigital electrodes are currently limited in potential 5G applications due to the accompanied spurious modes and small capacitance.
Zhiwei Wen   +10 more
semanticscholar   +1 more source

Dexterous formation of unconventional Chladni patterns using standing bulk acoustic waves

, 2020
Classical Chladni patterns formed by vibrations of flat plates have been studied for centuries and are well understood. In this Letter, we show dexterous formation of unconventional Chladni patterns in a fluid using standing bulk acoustic waves.
Junjun Lei   +4 more
semanticscholar   +1 more source

BULK ACOUSTIC WAVE GYROSCOPE

The Journal of the Acoustical Society of America, 2012
Capacitive bulk acoustic wave x, y and z-axes gyroscopes implemented on (100) and (111) silicon substrates are disclosed. Exemplary gyroscopes comprise a handle substrate, a bulk acoustic wave resonator element supported by the handle substrate, and a plurality of electrodes surrounding and separated from the resonator element by very small capacitive ...
Farrokh Ayazi, Houri Johari
openaire   +1 more source

4.2 GHz LiNbO3 Film Bulk Acoustic Resonator

IUS, 2021
We have designed and fabricated LiNbO3 Film Bulk Acoustic Resonators operating around 4.2 GHz, suitable for C-band filters, with various bandwidths (60, 170, 300 and 500 MHz).
M. Bousquet   +13 more
semanticscholar   +1 more source

Thin film bulk acoustic wave filter

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2002
Thin film bulk acoustic wave (BAW) resonators (FBAR) are fabricated on a silicon nitride bridge using a ZnO piezolayer on a glass substrate and surface micromachining by standard thin film technology. These resonators exhibit a coupling constant k(t)2 = 7.8% at the first thickness extensional wave mode and are used as impedance elements in a ladder ...
Ellä, Juha   +4 more
openaire   +2 more sources

Bulk Acoustic Wave Resonators 3D Simulation

2007 International Symposium on Signals, Systems and Electronics, 2007
This article discusses numerical simulations of thin film bulk acoustic wave resonators. FBAR simulation with 1D analytical model permits to quickly determine resonator layers thicknesses that correspond to the objective resonant frequency. 3D finite elements method permits to investigate the effect of the electrode shape on the spurious modes that are
Sylvain Giraud   +3 more
openaire   +1 more source

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