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Micromachined bulk acoustical-wave RF filters
Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004., 2005We present the performance of RF filters based on thin film bulk acoustical resonator (FBAR) technology for wireless communication applications. The filter is fabricated using surface micromachining processes and is hermetically sealed using wafer-level packaging with solder bumps on each electrical terminal, ready for flip-chip assembly.
null Kan Wang, P. Bradley, M. Gat
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Surface skimming bulk acoustic wave accelerometer
The Journal of the Acoustical Society of America, 1988An accelerometer includes a cantilevered pieozelectric beam mounted to a surface inside a fluid filled chassis with a proof mass attached to the beam's free end. Surface skimming bulk wave delay lines are mounted on opposing major surfaces of the beam and are responsive to strain induced therein by acceleration of the proof mass.
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High-temperature bulk acoustic wave sensors
Measurement Science and Technology, 2010Piezoelectric crystals like langasite (La3Ga5SiO14, LGS) and gallium orthophosphate (GaPO4) exhibit piezoelectrically excited bulk acoustic waves at temperatures of up to at least 1450 °C and 900 °C, respectively. Consequently, resonant sensors based on those materials enable new sensing approaches.
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Bulk acoustic wave coupled resonator filters
Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234), 2003Coupled resonator filters (CRF) are a new form of bulk acoustic wave device that involves the vertical stacking of resonators. In that regard, the CRF can be thought of as a variation on the better known stacked crystal filter (SCF). However, the CRF is actually somewhat more analogous to the monolithic crystal filter (MCF) that was a mainstay in ...
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Investigation of Shallow Bulk Acoustic Waves
The Journal of the Acoustical Society of America, 1983Abstract : This final report summarizes the most important results of the Investigation of Shallow Bulk Acoustic Waves (SBAW) program. This program was conceived on the principle that SBAW technology could lead to devices that are superior to those presently available for frequency filtering and control.
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Shallow Bulk Acoustic Wave Filters
1978 Ultrasonics Symposium, 1978K.H. Yen, K.F. Lau, R.S. Kagiwada
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Aligning carbon nanotubes using bulk acoustic waves to reinforce polymer composites
, 2014M. Haslam, B. Raeymaekers
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Dynamic behavior of microscale particles controlled by standing bulk acoustic waves
, 2014J. Greenhall +2 more
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