Results 261 to 270 of about 135,051 (324)
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IEEE Transactions on Instrumentation and Measurement, 2023
The presence of abnormal muscle retraction and contraction during the rehabilitation training poses significant challenges for patients with lower limb dysfunction caused by stroke, as it hinders their ability to regain lower limb function. Therefore, it
Lin Chen +5 more
semanticscholar +1 more source
The presence of abnormal muscle retraction and contraction during the rehabilitation training poses significant challenges for patients with lower limb dysfunction caused by stroke, as it hinders their ability to regain lower limb function. Therefore, it
Lin Chen +5 more
semanticscholar +1 more source
New design of micromachined capacitive force sensor
Journal of Micromechanics and Microengineering, 1993Anisotropic etching of a (110) oriented silicon wafer has been used to realize a differential capacitive force sensor. This design is based on a simple concept allowing force to be measured in the plane of the sensor, giving a new and original product in the field of small force measurements.
M Despont +3 more
openaire +1 more source
IEEE/LEOS International Conference on Optical MEMS, 2023
This study extends the capacitive tactile force sensor array to develop a novel force transmission structure for sensitivity enhancement (Fig. 1). The sensor is designed and implemented using the commercial TSMC 1P6M CMOS process.
Yuanyuan Huang +5 more
semanticscholar +1 more source
This study extends the capacitive tactile force sensor array to develop a novel force transmission structure for sensitivity enhancement (Fig. 1). The sensor is designed and implemented using the commercial TSMC 1P6M CMOS process.
Yuanyuan Huang +5 more
semanticscholar +1 more source
Capacitive Force Sensor with Wide Dynamic Range Using Wrinkled Micro Structures as Dielectric Layer.
Journal of Nanoscience and Nanotechnology, 2019We propose a wide dynamic range capacitive force sensor with two wrinkle-structured elastomer layers as a dielectric layer. The sensor consists of electrodes on each substrate and two dielectric layers between them.
Chan-Hoon Na, K. Yun
semanticscholar +1 more source
MEMS capacitive force sensors for cellular and flight biomechanics
Biomedical Materials, 2007Microelectromechanical systems (MEMS) are playing increasingly important roles in facilitating biological studies. They are capable of providing not only qualitative but also quantitative information on the cellular, sub-cellular and organism levels, which is instrumental to understanding the fundamental elements of biological systems.
Yu, Sun, Bradley J, Nelson
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A capacitive tri-axial tactile force sensor design
Proceedings of IEEE/ASME International Conference on Advanced Intelligent Mechatronics, 2002Summary form only given. A tri-axial tactile force sensor design is presented. The multiple electrode design allows the sensor to detect displacements of an electrode relative to a second set of electrodes. The primary role of this force sensor is for integration into the finger of an articulated hand such as the Stanford/JPL hand or the Utah/MIT hand.
T.A. Chase, R.C. Luo
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Design and Testing of a New Microinjector With Capacitive Force Sensor for Biological Microinjection
IEEE Transactions on Automation Science and EngineeringMicroinjection with force sensing plays an important role in delivering foreign materials into biological entities. In this paper, a new force-sensing microinjector with compliant mechanism is presented. It provides a high sensitivity of force sensing by
Yuzhang Wei +5 more
semanticscholar +1 more source
Design of a High Sensitivity Capacitive Force Sensor
2007 7th IEEE Conference on Nanotechnology (IEEE NANO), 2007This paper presents the design and development of a MEMS based, capacitive sensor for micro-force measurement. The sensor has an overall dimension of 3600 mum times 1000 mum times 10 mum and was fabricated using the Micragem fabrication process. A displacement reduction mechanism is incorporated in this sensor design to increase the sensitivity of the ...
Henry K. Chu +2 more
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MEMS Capacitive Force Sensor for Use in Microassembly
2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, 2008This paper presents the design and modeling of a MEMS capacitive sensor for use in microassembly processes. Force monitoring is an important aspect in microassembly processes. It can be used to control the movement of the microgripper to properly engage with and release the micropart without physical damages due to excessive force.
Henry K. Chu +2 more
openaire +1 more source
International Conference on Solid-State Sensors, Actuators and Microsystems, 2021
This study proposes a novel design to implement a triaxial tactile force sensor, as shown in Fig. 1. The tactile force sensor is fabricated by TSMC standard CMOS process.
Yen-Lin Chen +4 more
semanticscholar +1 more source
This study proposes a novel design to implement a triaxial tactile force sensor, as shown in Fig. 1. The tactile force sensor is fabricated by TSMC standard CMOS process.
Yen-Lin Chen +4 more
semanticscholar +1 more source