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Performance Optimization of a Capacitive Pressure Sensor
Key Engineering Materials, 2015In this paper, the thermo-mechanical modelling of an entire sensor structure, under hydrostatic pressure, is carried out using commercial FEM software COMSOL multiphysics. A comparison of the obtained results with those found in the literature, allows us to corroborate the well-known models.
F. Kerrour +2 more
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The First Production Automotive Capacitive Pressure Sensor
SAE Technical Paper Series, 1978<div class="htmlview paragraph">A new type of pressure sensor has been introduced into the 1978 production automobile. This design, consisting of a unique capacitive approach, requires the use of only one moving part to produce a voltage output which is proportional to the input pressure signal.
Gary M. Marx, Robert L. Bell
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Study on MEMS Capacitive Differential Pressure Sensor
Key Engineering Materials, 2014The design and fabrication of MEMS capacitive differential pressure sensor is reported. Silicon membrane is used as movable electrode. Gold metal film on glass is used as fixed electrode. Anodic bonding is used to bond together the silicon and glass to form the capacitive pressure sensor.
Zhi Hao Hou, Zhen Huang, Shi Xing Jia
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An 8x8 Robust Capacitive Pressure Sensor Array
Micro-Electro-Mechanical Systems (MEMS), 1998Abstract In this work, robust substrates, such as stainless steel, have been studied as substrates for micromachined devices. The use of robust substrates may allow for the co-fabrication of micromachined devices and sensor packages. Lamination process techniques combined with traditional micromachining processes have been investigated ...
Sung-Pil Chang +2 more
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Optimization of MEMS intraocular capacitive pressure sensor
2016 IEEE International Conference on Semiconductor Electronics (ICSE), 2016MEMS intraocular capacitive pressure sensor is used for monitoring glaucoma disease. The structure of the diaphragm of MEMS capacitive pressure sensor is one of the important factors which could affect the sensor's performance. In this paper, Taguchi and Two-Level Factorial approach are employed to optimize the size of diaphragm thickness, slot width ...
Muslihah Ali +5 more
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Capacitive cylinder pressure sensor
A capacitive pressure sensor for an internal combustion engine is provided having a housing having a bottom surface, variable capacitor and circuitry. The variable capacitor is formed by a stationary electrode and an elastically bendable electrode. Pressure exerted on the bottom surface acts to bend the elastically bendable electrode.Sillanpää, Teuvo +2 more
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Microstructure-based Direct Digital Capacitive Pressure Sensor
2020Pressure sensors are important in many applications, from medical hyperbaric oxygen chambers to precision pressure monitoring in vacuum setups of semiconductor manufacturing. With their simple design and high precision, capacitive pressure sensors are one of the best designs of pressure sensors. In this thesis, we proposed a new class of microstructure-
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Nanofluidics for osmotic energy conversion
Nature Reviews Materials, 2021, Liping Wen, Lei Jiang
exaly
Cryogenic Applications of Capacitance-Type Pressure Sensors
1986Precise pressure measurement is an important requirement frequently encountered in cryogenic experimentation. Applications range from vapor pressure and gas thermometry to gas sample density measurements. Since a capacitance-type pressure sensing element can be constructed of non-magnetic, UHV-compatible materials to cover a wide range of pressure, be ...
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Innovations in research and clinical care using patient‐generated health data
Ca-A Cancer Journal for Clinicians, 2020H S L Jim +2 more
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