Results 251 to 260 of about 197,736 (320)

Design and Numerical Simulation of Capacitive Pressure Sensor Based on Silicon Carbide

IEEE Sensors Journal, 2023
In this study, a capacitive pressure sensor based on silicon carbide is designed and simulated. This sensor is suitable for extremely harsh environments such as high hydraulic pressure and high temperature.
Qi Zhou, Xianyun Liu, Shengting Luo, Xingfang Jiang, Di Yang, Wulong Yuan   +5 more
semanticscholar   +1 more source

Single-Wafer Pressure Capacitive Sensor

2007 IEEE International Symposium on Circuits and Systems (ISCAS), 2007
A novel manufacturing process for pressure sensor without the need of wafer bonding is presented. Its main advantages are a simple fabrication process and an efficient integr ability with other devices. The sensor is composed of a polysilicon membrane that deflects due to the pressure difference applied over it.
R.G. Bolea, A. Luque, J.M. Quero
openaire   +1 more source

Capacitive pressure sensor for MEMS

SPIE Proceedings, 2003
Pressure sensors have widespread applications in medicine and automotive industry. Specific designs and mounting arrangements vary considerably, ranging from small, sensitive catheter-tip transducers used within the heart to the bigger, rugged devices needed for industrial process control.
Amita Gupta, Amir Ahmad, Ranvir Singh
openaire   +1 more source

A flexible and highly sensitive capacitive pressure sensor with fast response based on a hierarchically micro-structured PDMS dielectric layer

Journal of Micromechanics and Microengineering, 2023
Flexible high-sensitivity pressure sensors have seen rapid growth in the last few years in applications like electronic skin, smart wearables and medical health monitoring.
Jiamin Li, Jie Zhang, Lei Qin, Luyu Lv, Tian Liu, Yanting Zhang, R. Dhakal, Xiao Li, Tian Liu, Yuanyue Li, Zhao Yao   +10 more
semanticscholar   +1 more source

Catheter‐tip capacitive pressure sensor

Electronics and Communications in Japan (Part II: Electronics), 1990
AbstractAs a pressure sensor to be used at the tip of a catheter, a capacitive relative pressure sensor was fabricated. This paper describes the fabrication process and the characteristics of this pressure sensor.The size of the sensor fabricated is 0.7 × 3.5 × 0.8 mm3 and the spacing between the capacitor electrodes is either 1.0 μm or 1.5 μm.
Masayoshi Esashi, Shuichi Shoji, Yosinori Matsumoto, Kazuyoshi Furuta   +3 more
openaire   +1 more source

Highly Sensitive Flexible Capacitive Pressure Sensor with Porous Hierarchical Structure Realized by a Microwave Curing Method

Advanced Engineering Materials, 2023
The introduction of porous hierarchical microstructures effectively improves the sensitivity of flexible pressure sensors. However, it is difficult to achieve porous hierarchical microstructures for pressure sensors through inexpensive, efficient, and ...
Rui Ma, Yilin Zhao, Haobing Chen, Ziran Zeng, Yunfan Li, Ruiyuan Wang, Feng Liu   +6 more
semanticscholar   +1 more source

Touch mode capacitive pressure sensors

Sensors and Actuators A: Physical, 1999
Touch mode capacitive pressure sensors offer better performance in industrial applications than other devices. In touch mode operation, the diaphragm of the capacitive pressure sensor touches the substrate structure in operation range. The advantages of this mode of operation are near-linear output characteristics, large over-range pressure and robust ...
Wen H. Ko, Qiang Wang
openaire   +1 more source

High-Performance Flexible Capacitive Pressure Sensor Based on a Spiked Nickel/Polyimide Composite Nanofiber Membrane.

ACS Sensors
Flexible capacitive pressure sensors are now widely used in the fields of electronic skin, medical monitoring, and human-computer interaction. However, most of the current flexible capacitive pressure sensors generally suffer easy saturation and low ...
Luntao Xia, Wei Xiao, Luoxin Li, Xin Liu, Qibin Zhuang, Yong Huang, Tianhao Lan, Xiaohui Du, Yang Zhao, Dezhi Wu   +9 more
semanticscholar   +1 more source

Bioinspired Engineering of Fillable Gradient Structure into Flexible Capacitive Pressure Sensor Toward Ultra-High Sensitivity and Wide Working Range.

Macromolecular rapid communications, 2023
Tactile sensing is required for electronic skin and intelligent robots to function properly. However, the dielectric layer's poor structural compressibility in conventional pressure sensors results in a limited pressure sensing range and low sensitivity.
W.-L. Hong, Xiaohui Guo, Tianxu Zhang, Yiyang Liu, Zihao Yan, Anqi Zhang, Zhibin Qian, Junyi Wang, Xinyi Zhang, Chengchao Jin, Jingji Zhao, Tiancheng Liu, Qi Hong, Yaohua Xu, Yun Xia, Yunong Zhao   +15 more
semanticscholar   +1 more source

Miniature polymer capacitive pressure sensor

Proceedings 2007 IEEE SoutheastCon, 2007
This paper describes the development of a miniaturized pressure sensing device made of polymer materials. An all-polymer design imparts a high degree of physical flexibility, if required, and makes the device very lightweight. The use of moldable polymers for the device components allows the rapid prototyping of this device, cutting down production ...
Naga Korivi, Li Jiang
openaire   +1 more source