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Transparent, Flexible, Conformal Capacitive Pressure Sensors with Nanoparticles
Small, 2018AbstractThe fundamental challenge in designing transparent pressure sensors is the ideal combination of high optical transparency and high pressure sensitivity. Satisfying these competing demands is commonly achieved by a compromise between the transparency and usage of a patterned dielectric surface, which increases pressure sensitivity, but decreases
Hyeohn Kim +10 more
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IEEE Sensors Journal
Capacitive sensors with high sensitivity, flexibility, stability, and low power consumption have broad applications in wearable electronics, tactile perception, and more.
Hai-Tian Jiang +5 more
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Capacitive sensors with high sensitivity, flexibility, stability, and low power consumption have broad applications in wearable electronics, tactile perception, and more.
Hai-Tian Jiang +5 more
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A Capacitive MEMS Pressure Sensor With Wavy Membrane and Linear Capacitance-Pressure Response
Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, 2019Abstract A novel structure for capacitive MEMS pressure sensors is presented that can be used for a wide range of pressure sensing applications. The sensor is designed such that its characteristic capacitance-pressure (C-P) response is highly linear and could cover a wide range of working pressure.
Stephen Oke, Mohammad Shavezipur
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Performance Optimization of a Capacitive Pressure Sensor
Key Engineering Materials, 2015In this paper, the thermo-mechanical modelling of an entire sensor structure, under hydrostatic pressure, is carried out using commercial FEM software COMSOL multiphysics. A comparison of the obtained results with those found in the literature, allows us to corroborate the well-known models.
F. Kerrour +2 more
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Research progress of flexible capacitive pressure sensor for sensitivity enhancement approaches
, 2020Flexible pressure sensors have played a great role in acquiring information from human and automatics because of their wide use in electronic skin, soft robot, human-machine interaction and so on.
Ruiqing Li +7 more
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The First Production Automotive Capacitive Pressure Sensor
SAE Technical Paper Series, 1978<div class="htmlview paragraph">A new type of pressure sensor has been introduced into the 1978 production automobile. This design, consisting of a unique capacitive approach, requires the use of only one moving part to produce a voltage output which is proportional to the input pressure signal.
Gary M. Marx, Robert L. Bell
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Study on MEMS Capacitive Differential Pressure Sensor
Key Engineering Materials, 2014The design and fabrication of MEMS capacitive differential pressure sensor is reported. Silicon membrane is used as movable electrode. Gold metal film on glass is used as fixed electrode. Anodic bonding is used to bond together the silicon and glass to form the capacitive pressure sensor.
Zhi Hao Hou, Zhen Huang, Shi Xing Jia
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An 8x8 Robust Capacitive Pressure Sensor Array
Micro-Electro-Mechanical Systems (MEMS), 1998Abstract In this work, robust substrates, such as stainless steel, have been studied as substrates for micromachined devices. The use of robust substrates may allow for the co-fabrication of micromachined devices and sensor packages. Lamination process techniques combined with traditional micromachining processes have been investigated ...
Sung-Pil Chang +2 more
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Optimization of MEMS intraocular capacitive pressure sensor
2016 IEEE International Conference on Semiconductor Electronics (ICSE), 2016MEMS intraocular capacitive pressure sensor is used for monitoring glaucoma disease. The structure of the diaphragm of MEMS capacitive pressure sensor is one of the important factors which could affect the sensor's performance. In this paper, Taguchi and Two-Level Factorial approach are employed to optimize the size of diaphragm thickness, slot width ...
Muslihah Ali +5 more
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Capacitive cylinder pressure sensor
A capacitive pressure sensor for an internal combustion engine is provided having a housing having a bottom surface, variable capacitor and circuitry. The variable capacitor is formed by a stationary electrode and an elastically bendable electrode. Pressure exerted on the bottom surface acts to bend the elastically bendable electrode.Sillanpää, Teuvo +2 more
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