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Capacitive Silicon Differential Pressure Sensor

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95, 2005
A capacitive differential pressure sensor based on silicon bulk micromachining is presented. This sensor, which is part of a flow metering system, transforms the differential pressure delivered by a fluidic oscillator into capacitance variations. These variations are then converted by an ASIC into a digital output signal.
J. Hermann   +3 more
openaire   +1 more source

Soft Capacitive Pressure Sensors: Trends, Challenges, and Perspectives

ACS Nano, 2022
Soft pressure sensors are critical components of e-skins, which are playing an increasingly significant role in two burgeoning fields: soft robotics and bioelectronics. Capacitive pressure sensors (CPS) are popular given their mechanical flexibility, high sensitivity, and signal stability.
Kyoung-Ho Ha   +3 more
openaire   +2 more sources

Flexible capacitive pressure sensor with high sensitivity and wide detection range applying solvent-exchanged porous lignin-cellulose hydrogel as the dielectric layer.

International Journal of Biological Macromolecules
Recently, the application of flexible sensors for wearable devices has attracted much attention from researchers. This study reports a capacitive pressure sensor with a solvent-exchanged porous lignin-cellulose hydrogel as the dielectric layer (SPLCH ...
Junyao Wang   +8 more
semanticscholar   +1 more source

A Rational Design of Bio‐Derived Disulfide CANs for Wearable Capacitive Pressure Sensor

Advances in Materials
Classic approaches to integrate flexible capacitive sensor performance are to on‐demand microstructuring dielectric layers and to adjust dielectric material compositions via the introduction of insoluble carbon additives (to increase sensitivity) or ...
Ding Yang   +6 more
semanticscholar   +1 more source

Flexible and Wearable Capacitive Pressure Sensor for Monitoring Heart Parameters

IEEE Journal on Flexible Electronics, 2023
The increase in global average life expectancy over the past century has been largely attributed to medical science developments. In this study, we demonstrate a polymer-based capacitive pressure sensor for measuring heart rate and pulse pressure (PP ...
L. Singh, M. Bhattacharjee
semanticscholar   +1 more source

Piezo-Capacitive Flexible Pressure Sensor with Magnetically Self-Assembled Microneedle Array.

ACS Sensors
Flexible pressure sensors are pivotal in advancing artificial intelligence, the Internet of Things (IoT), and wearable technologies. While microstructuring the functional layer of these sensors effectively enhances their performance, current fabrication ...
Shengbin Li   +9 more
semanticscholar   +1 more source

Capacitive Pressure Sensor Combining Dual Dielectric Layers with Integrated Composite Electrode for Wearable Healthcare Monitoring.

ACS Applied Materials and Interfaces
Foot activity can reflect numerous physiological abnormalities in the human body, making gait a valuable metric in health monitoring. Research on flexible sensors for gait monitoring has focused on high sensitivity, wide working range, fast response, and
Xinyue Li   +7 more
semanticscholar   +1 more source

A Flexible Capacitive Pressure Sensor with Adjustable Detection Range Based on the Inflatable Dielectric Layer for Human-Computer Interaction.

ACS Applied Materials and Interfaces
As an essential component in wearable electronic devices and intelligent robots, flexible pressure sensors have enormous application value in fields such as healthcare, human-computer interaction, and intelligent perception.
Yuxia Li   +9 more
semanticscholar   +1 more source

A Thin-Film Capacitance Pressure Sensor

Measurement Techniques, 2015
Results of theoretical and experimental investigations of thin-film capacitance sensors for measurements of static and pulsation pressures are presented. The sensor membrane is produced from Fe–Ni alloy.
A. A. Kazaryan, E. V. Strel’tsov
openaire   +1 more source

Flexible capacitive pressure sensor: material, structure, fabrication and application

Nondestructive Testing and Evaluation
Flexible capacitive pressure sensors have garnered significant attention in research areas such as electronic skin, wearable devices, medical diagnosis, physical health detection, and artificial intelligence due to their advantageous characteristics ...
Caozhen Dong   +9 more
semanticscholar   +1 more source

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