Results 201 to 210 of about 8,919 (257)

Capacitive piezotronics. [PDF]

open access: yesNat Commun
Xu L   +9 more
europepmc   +1 more source

Touch mode capacitive pressure sensors

Sensors and Actuators A: Physical, 1999
Touch mode capacitive pressure sensors offer better performance in industrial applications than other devices. In touch mode operation, the diaphragm of the capacitive pressure sensor touches the substrate structure in operation range. The advantages of this mode of operation are near-linear output characteristics, large over-range pressure and robust ...
Wen H Ko
exaly   +2 more sources

Single-Wafer Pressure Capacitive Sensor

2007 IEEE International Symposium on Circuits and Systems (ISCAS), 2007
A novel manufacturing process for pressure sensor without the need of wafer bonding is presented. Its main advantages are a simple fabrication process and an efficient integr ability with other devices. The sensor is composed of a polysilicon membrane that deflects due to the pressure difference applied over it.
R. G. Bolea   +2 more
openaire   +1 more source

Capacitive pressure sensor for MEMS

SPIE Proceedings, 2003
Pressure sensors have widespread applications in medicine and automotive industry. Specific designs and mounting arrangements vary considerably, ranging from small, sensitive catheter-tip transducers used within the heart to the bigger, rugged devices needed for industrial process control.
Amita Gupta, Amir Ahmad, Ranvir Singh
openaire   +1 more source

Novel Capacitive Pressure Sensor

Journal of Microelectromechanical Systems, 2010
A new microelectromechanical-systems capacitive pressure sensor with extremely high sensitivity (2.24 ?F/kPa) is introduced. The sensor essentially consists of a small drop of mercury and a flat aluminum electrode that are separated by a 1 ?m-thick layer of Barium Strontium Titanate (a high dielectric-constant ceramic).
Ezzat G Bakhoum, Marvin H M Cheng
openaire   +1 more source

Liquid Level Measurement through Capacitive Pressure Sensor

2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 2020
Property of fluid and material compatibility limit the level sensor’s fabrication, dynamic range and accuracy. Piezoresistive pressure sensing elements with media compatible diaphragm are limited in low pressure dynamic. In contrast, capacitive pressure sensing elements provide better solution in terms of dynamic range.
Esmaili P.   +3 more
openaire   +1 more source

Capacitive Pressure Sensor Modelling

2009 Second International Conference on Advances in Circuits, Electronics and Micro-electronics, 2009
The paper deals with an application theory of elasticity in the capacitive pressure sensor. A basis of this paper has been focused to the elastic part of the described model. This model has a second part which is used for solving of electric field and electric capacity.
Martin Magat   +3 more
openaire   +1 more source

Contamination insensitive differential capacitive pressure sensors

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), 2000
In this paper, a contamination-insensitive differential capacitive pressure sensor with a sealed gap is presented. This device is made of three polysilicon layers including a stationary middle plate and the top and bottom plates that are rigidly coupled together by a series of posts hence deflecting in tandem by a change in differential or gauge ...
null Chuan Che Wang   +3 more
openaire   +1 more source

A Super-Capacitive Pressure Sensor for a Urethral Catheter

2018 40th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), 2018
Urinary incontinence can be due to neuromuscular or structural problems in either the bladder or the urethra. Urodynamics is often used to analyze the patientspecific cause of urinary incontinence. In urodynamics, a challenging part of the studies involves measurement of the urethral (contact) pressure profile.
Mahdi Ahmadi   +4 more
openaire   +2 more sources

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