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Dual-Mode Triboelectric and Capacitive Pressure Sensor Based on Anodic Aluminum Oxide. [PDF]
Nanomaterials (Basel)Yu CY +5 more
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Arrayed Micropillar Ionic Film Iontronic Flexible Pressure Sensor and Its Wearable Sensing Applications. [PDF]
Micromachines (Basel)Liang W, Huang X.
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An Embedded Multi-Sensor IoT Platform for Agricultural Monitoring Using Meshtastic-Based LoRa Communication and Cloud Microservices. [PDF]
Sensors (Basel)Negulescu C +3 more
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Single-Wafer Pressure Capacitive Sensor
2007 IEEE International Symposium on Circuits and Systems (ISCAS), 2007A novel manufacturing process for pressure sensor without the need of wafer bonding is presented. Its main advantages are a simple fabrication process and an efficient integr ability with other devices. The sensor is composed of a polysilicon membrane that deflects due to the pressure difference applied over it.
R. G. Bolea +2 more
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Capacitive pressure sensor for MEMS
SPIE Proceedings, 2003Pressure sensors have widespread applications in medicine and automotive industry. Specific designs and mounting arrangements vary considerably, ranging from small, sensitive catheter-tip transducers used within the heart to the bigger, rugged devices needed for industrial process control.
Amita Gupta, Amir Ahmad, Ranvir Singh
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Novel Capacitive Pressure Sensor
Journal of Microelectromechanical Systems, 2010A new microelectromechanical-systems capacitive pressure sensor with extremely high sensitivity (2.24 ?F/kPa) is introduced. The sensor essentially consists of a small drop of mercury and a flat aluminum electrode that are separated by a 1 ?m-thick layer of Barium Strontium Titanate (a high dielectric-constant ceramic).
Ezzat G Bakhoum, Marvin H M Cheng
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Capacitive Pressure Sensor Modelling
2009 Second International Conference on Advances in Circuits, Electronics and Micro-electronics, 2009The paper deals with an application theory of elasticity in the capacitive pressure sensor. A basis of this paper has been focused to the elastic part of the described model. This model has a second part which is used for solving of electric field and electric capacity.
Martin Magat +3 more
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Liquid Level Measurement through Capacitive Pressure Sensor
2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 2020Property of fluid and material compatibility limit the level sensor’s fabrication, dynamic range and accuracy. Piezoresistive pressure sensing elements with media compatible diaphragm are limited in low pressure dynamic. In contrast, capacitive pressure sensing elements provide better solution in terms of dynamic range.
Esmaili P. +3 more
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Contamination insensitive differential capacitive pressure sensors
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), 2000In this paper, a contamination-insensitive differential capacitive pressure sensor with a sealed gap is presented. This device is made of three polysilicon layers including a stationary middle plate and the top and bottom plates that are rigidly coupled together by a series of posts hence deflecting in tandem by a change in differential or gauge ...
null Chuan Che Wang +3 more
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