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Microsystems & NanoengineeringAbstractGraphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength, and piezoresistive electromechanical transductions.
Fan, Xuge +6 more
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Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
Microsystems & Nanoengineering, 2023 Pressure sensors play a vital role in aerospace, automotive, medical, and consumer electronics. Although microelectromechanical system (MEMS)-based pressure sensors have been widely used for decades, new trends in pressure sensors, including higher ...
Xiangguang Han +16 more
semanticscholar +1 more source
A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Nanoscale Research Letters, 2021 Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology.
A. Algamili +6 more
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Integrated silicon photonic MEMS
Microsystems & Nanoengineering, 2023 Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing ...
N. Quack +17 more
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Microelectromechanical Systems (MEMS) for Biomedical Applications
Micromachines, 2022 The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS).
Cristina Chircov, A. Grumezescu
semanticscholar +1 more source
MEMS Inertial Sensor Calibration Technology: Current Status and Future Trends
Micromachines, 2022 A review of various calibration techniques of MEMS inertial sensors is presented in this paper. MEMS inertial sensors are subject to various sources of error, so it is essential to correct these errors through calibration techniques to improve the ...
Xu Ru, Nian Gu, Hang Shang, Heng Zhang
semanticscholar +1 more source
A WS2 Case Theoretical Study: Hydrogen Storage Performance Improved by Phase Altering
Nanoscale Research Letters, 2020 Hydrogen is a clean energy with high efficiency, while the storage and transport problems still prevent its extensive use. Because of the large specific surface area and unique electronic structure, two-dimensional materials have great potential in ...
Jing Zhou +6 more
doaj +1 more source
Progress in semiconductor diamond photodetectors and MEMS sensors
Functional Diamond, 2021 Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily superior to those of the currently available wide-bandgap semiconductors for deep-ultraviolet (DUV) photoelectronics and microelectromechanical systems (MEMS).
M. Liao
semanticscholar +1 more source
Thermoelectric properties study on the BN nanoribbons via BoltzTrap first-principles
AIP Advances, 2021 Thermoelectric materials have attracted the attention of scientists because they directly convert waste heat of electric energy into valuable electrical energy.
Xiangqian Jiang +5 more
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A Low-Noise Interface ASIC for MEMS Disk Resonator Gyroscope
Micromachines, 2023 This paper proposes a low-noise interface application-specific integrated circuit (ASIC) for a microelectromechanical systems (MEMS) disk resonator gyroscope (DRG) which operates in force-to-rebalance (FTR) mode.
Wenbo Zhang +7 more
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