Results 31 to 40 of about 224,626 (360)

Boron Nitride Nanoribbons Grown by Chemical Vapor Deposition for VUV Applications

Micromachines, 2022
The fabrication process of vacuum ultraviolet (VUV) detectors based on traditional semiconductor materials is complex and costly. The new generation of wide-bandgap semiconductor materials greatly reduce the fabrication cost of the entire VUV detector ...
Jiandong Hao, Ling Li, Peng Gao, Xiangqian Jiang, Chuncheng Ban, Ningqiang Shi   +5 more
doaj   +1 more source

A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function

Micromachines, 2018
Sigma-delta (ΣΔ) closed-loop operation is the best candidate for realizing the interface circuit of MEMS accelerometers. However, stability and reliability problems are still the main obstacles hindering its further development for high-end ...
Dongliang Chen, Xiaowei Liu, Liang Yin, Yinhang Wang, Zhaohe Shi, Guorui Zhang   +5 more
doaj   +1 more source

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Micromachines, 2019
With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in ...
Jianxiong Zhu, Xinmiao Liu, Qiongfeng Shi, Tianyiyi He, Zhongda Sun, Xinge Guo, Weixin Liu, Othman Bin Sulaiman, B. Dong, Chengkuo Lee   +9 more
semanticscholar   +1 more source

Ultra-Low Frequency Eccentric Pendulum-Based Electromagnetic Vibrational Energy Harvester

Micromachines, 2020
With the development of low-power technology in electronic devices, the wireless sensor network shows great potential in applications in health tracing and ocean monitoring.
Mingxue Li, Huichao Deng, Yufeng Zhang, Kexin Li, Shijie Huang, Xiaowei Liu   +5 more
doaj   +1 more source

Hybrid Deep Recurrent Neural Networks for Noise Reduction of MEMS-IMU with Static and Dynamic Conditions

Micromachines, 2021
Micro-electro-mechanical system inertial measurement unit (MEMS-IMU), a core component in many navigation systems, directly determines the accuracy of inertial navigation system; however, MEMS-IMU system is often affected by various factors such as ...
Shipeng Han, Zhen Meng, Xingcheng Zhang, Yuepeng Yan   +3 more
semanticscholar   +1 more source

MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies

Microsystems & Nanoengineering, 2021
MEMS inductors are used in a wide range of applications in micro- and nanotechnology, including RF MEMS, sensors, power electronics, and Bio-MEMS.
Hoa Thanh Le, R. Haque, Z. Ouyang, Seung Woo Lee, S. Fried, Ding Zhao, M. Qiu, Anpan Han   +7 more
semanticscholar   +1 more source

Piezoelectrically Driven and Sensed Micromirrors with Extremely Large Scan Angles and Precise Closed-Loop Control

Proceedings, 2017
This paper reports piezoelectrically driven and sensed micromirrors achieving extremely large total optical scan angle of 106° and high frequency of 45 kHz at 22 V.
Shanshan Gu-Stoppel, Thorsten Giese, Hans-Joachim Quenzer, Ulrich Hofmann, Wolfgang Benecke   +4 more
doaj   +1 more source

Friction Reduction for a Rotational Gyroscope with Mechanical Support by Fabrication of a Biomimetic Superhydrophobic Surface on a Ball-Disk Shaped Rotor and the Application of a Water Film Bearing

Micromachines, 2017
Friction between contacting surfaces of metal materials restricts the application of mechanical support in the high-precision inertial device of a rotational gyroscope. Instead, a disk- or ring-shaped rotor is electrostatically or magnetically suspended.
Dianzhong Chen, Xiaowei Liu, Haifeng Zhang, Hai Li, Rui Weng, Ling Li, Zhongzhao Zhang   +6 more
doaj   +1 more source

On the investigation of a reliable actuation control method for ohmic RF MEMS switches [PDF]

, 2011
This is a post-print version of the article. The official published version can be accessed from the link below - Copyright @ 2011 ElsevierEfficient control of RF MEMS switches is a very important issue as it is correlated to main failure mechanisms ...
Nilavalan, R, Michalis Spasos, Rajagopal Nilavalan, Spasos, M   +3 more
core   +1 more source

THE MEMS PROJECT

Astroparticle, Particle and Space Physics, Detectors and Medical Physics Applications, 2008
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openaire   +2 more sources