Results 21 to 30 of about 224,626 (360)
MEMS for Photonic Integrated Circuits [PDF]
IEEE Journal of Selected Topics in Quantum Electronics, 2020 The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs.
C. Errando-Herranz +5 more
semanticscholar +1 more source
MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics
Micromachines, 2022 Commonly encountered problems in the manipulation of objects with robotic hands are the contact force control and the setting of approaching motion. Microelectromechanical systems (MEMS) sensors on robots offer several solutions to these problems along ...
Ilker S. Bayer
semanticscholar +1 more source
A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers
Sensors, 2019 The EM- Σ Δ (electromechanical sigma-delta) approach is a concise and efficient way to realize the digital interface for micro-electromechanical systems (MEMS) accelerometers.
Dongliang Chen +7 more
doaj +1 more source
Micro 3D printing of a functional MEMS accelerometer
Microsystems & Nanoengineering, 2022 Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries.
Simone Pagliano +7 more
semanticscholar +1 more source
An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control
Micromachines, 2019 This paper proposes an interface application-specific-integrated-circuit (ASIC) for micro-electromechanical systems (MEMS) vibratory gyroscopes. A closed self-excited drive loop is employed for automatic amplitude stabilization based on peak detection ...
Risheng Lv +8 more
doaj +1 more source
A Review of silicon carbide development in MEMS applications [PDF]
, 2009 Due to its desirable material properties, Silicon Carbide (SiC) hasbecome an alternative material to replace Si for MicroelectromechanicalSystems (MEMS) applications in harsh environments.
Cheung, R. +3 more
core +1 more source
Scientific Reports, 2017 The resistance of the bearing is a significant factor affecting the performance of the ball-disk rotor gyroscope. The micro and nano combined surface with low surface energy material modifications can be hydrophobic.
Rui Weng +4 more
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Scientific Reports, 2017 Unique hybrid nanostructure, which consists of multi-wall carbon nanotube (MWCNT) stems and MoS2 nanosheet (NS) leaves, are prepared by a hydrothermal method.
Jiamu Cao +3 more
doaj +1 more source
A Quick Start Method for MEMS Disk Resonant Gyroscope
Sensors, 2021 High-precision disk resonator gyroscope has a high quality factor in order to improve the performance of the gyroscope, as the high quality factor can lead to a long starting time.
Xiaodong Xu, Xiaowei Liu, Yufeng Zhang
doaj +1 more source
Recent Progress of Miniature MEMS Pressure Sensors
Micromachines, 2020 Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects ...
Peishuai Song +8 more
semanticscholar +1 more source