Results 91 to 100 of about 6,682 (189)

Novel Probability Density Function of Pad Asperity by Wear Effect over Time in Chemical Mechanical Planarization. [PDF]

Materials (Basel)
Jeong S, Shin Y, Jeong J, Jeong S, Jeong H.   +4 more
europepmc   +1 more source

A flexible nanobrush pad for the chemical mechanical planarization of Cu/ultra-low-к materials. [PDF]

Nanoscale Res Lett, 2012
Han G, Liu Y, Lu X, Luo J.
europepmc   +1 more source

5 x 20 Gb/s heterogeneously integrated III-V on silicon electro-absorption modulator array with arrayed waveguide grating multiplexer [PDF]

, 2015
Bauwelinck, Johan, Chen, Kaixuan, Cheng, Jianxin, Fu, Xin, He, Sailing, Hu, Yingtao, Huang, Qiangsheng, Liu, Liu, Ma, Keqi, Roelkens, Günther, Shi, Yaocheng, Tassaert, Martijn, Verbist, Jochem, Xie, Weiqiang, Zhang, Chenzhao, Zhang, Jianhao   +15 more
core   +1 more source

YO nanosheets as slurry abrasives for chemical-mechanical planarization of copper [PDF]

core   +1 more source

CMOS-Compatible Fabrication Module for Sub-100 nm TiN and TaN Pillar Electrodes for Carbon Nanotube Test Structures. [PDF]

Nanomaterials (Basel)
Chen G, Fujii T, Yamada T, Hata K.
europepmc   +1 more source

Flow-Induced Dynamic Dispersion in Dispersant-Free Mixed-Oxide Slurry Systems. [PDF]

Langmuir
Lin YA, Yeh FM, Hu B, Huang TK, Lu HH, Zhong H, Li CC.   +6 more
europepmc   +1 more source

Wettability-Controlled Hydrophobic Coating of CMP Component Using PTFE and DLC for Mitigating Slurry Agglomeration and Contamination. [PDF]

Micromachines (Basel)
Lee E, Sun K, So Y, Baek J, Shin JH, Kim HD, Youn YB, Kim MW.   +7 more
europepmc   +1 more source

Process Temperature Control for Low Dishing in CMP. [PDF]

Materials (Basel)
Shin Y, Jeong J, Shin J, Jeong H.
europepmc   +1 more source

Planarization of Twisted Push-Pull Probes by Stretching Rather than by Compression: Core-Substituted Fluorescent Flippers as Materials Mechanosensors. [PDF]

JACS Au
Pamungkas KKP, Yamamoto R, Vonesch M, Sakai N, Sagara Y, Matile S.   +5 more
europepmc   +1 more source

Flipper dendrimers. [PDF]

Chem Sci
Gonzalez-Sanchis N, Bayard F, García-Arcos JM, Mandal T, Roux A, Sakai N, Matile S.   +6 more
europepmc   +1 more source