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Hydrocolloid-Based Multiwavelength Stretchable QD-OLED Patch for Simultaneous Neonatal Jaundice and Dermatitis Treatment with Biosignal Monitoring. [PDF]
Kim IH +10 more
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An Analysis of Arrays with Irregular Apertures in MEMS Smart Glasses for the Improvement of Clear View. [PDF]
Donatiello R +9 more
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Tailoring luminescent oxygen sensitivity <i>via</i> structural design and its application in pressure-induced emission enhancement. [PDF]
Zhang HJ +4 more
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Non-macrocyclic molecular design enables cavity-adaptive cocrystals with high elasticity and low-threshold lasing. [PDF]
Feng Z +9 more
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Colloid aspects of chemical–mechanical planarization
Journal of Colloid and Interface Science, 2008The essential parts of interconnects for silicon based logic and memory devices consist of metal wiring (e.g. copper), a barrier metal (Ta, TaN), and of insulation (SiO2, low-k polymer). The deposition of the conducting metal cannot be confined to trenches, resulting in additional coverage of Cu and Ta/TaN on the surface of the dielectrics, yielding an
E, Matijević, S V, Babu
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Chemical mechanical planarization of gold
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2014In this article, the authors investigate chemical mechanical planarization (CMP) of gold. Our experiments show that the oxidizer concentration, hardness of the adhesion layer, and surfactants added to stabilize the slurry are the main factors determining the outcome of the process.
Golnaz Karbasian +4 more
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Advances in Chemical-Mechanical Planarization
MRS Bulletin, 2002AbstractThe primary aim of this issue of MRS Bulletin is to present an overview of the materials issues in chemical–mechanical planarization (CMP), also known as chemical–mechanial polishing, a process that is used in the semiconductor industry to isolate and connect individual transistors on a chip.
Rajiv K. Singh, Rajeev Bajaj
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