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Thickness measurement method for self-supporting film with double chromatic confocal probes
Applied Optics, 2021With the randomness and immeasurability properties of zero point, the conventional self-supporting film thickness measurement model must calibrate the distance between two chromatic confocal sensors using a standard part whose thickness needs to be measured by other methods in advance. The measurement performance is easily disturbed
Jiafu Li +5 more
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Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe
JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, 2020Abstract Confocal probes are widely employed in many industrial fields due to the depth-sectioning effect. The author’s group has also proposed a chromatic confocal probe employing a mode-locked femtosecond laser source which can realize an axial resolution of 30 nm and a measurement range of 40 μm Efforts have also been made to improve ...
Ryo Sato +3 more
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Optics & Laser Technology, 2021
Abstract Inspecting a high-gradient freeform surface is a challenging task in manufacturing automation due to its complexity of the surface and high-aspect-ratio. On-machine measurement has shown remarkable achievements in ultra-precision manufacturing.
Yongqing Wang +8 more
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Abstract Inspecting a high-gradient freeform surface is a challenging task in manufacturing automation due to its complexity of the surface and high-aspect-ratio. On-machine measurement has shown remarkable achievements in ultra-precision manufacturing.
Yongqing Wang +8 more
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A chromatic confocal probe with a mode-locked femtosecond laser source
Optics & Laser Technology, 2018Abstract The high spatial coherence and high stability of a mode-locked femtosecond laser source make it ideal for chromatic confocal imaging. Nevertheless, the high non-smoothness of spectrum of the mode-locked laser source often restricts its application in chromatic confocal probes for a wide range of depth measurement.
Xiuguo Chen +6 more
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Characterization of the main error sources of chromatic confocal probes for dimensional measurement
Measurement Science and Technology, 2014Chromatic confocal probes are increasingly used in high-precision dimensional metrology applications such as roughness, form, thickness and surface profile measurements; however, their measurement behaviour is not well understood and must be characterized at a nanometre level.
H Nouira, N El-Hayek, X Yuan, N Anwer
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JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, 2020
Abstract Aspherical or free-form optical surface machining using an ultra-precision machine tool is a common and effective method in precision optics manufacturing. However, this method sometimes causes waviness due to the machine’s motion in mid-spatial frequency (MSF) form deviations.
Hao Duan +4 more
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Abstract Aspherical or free-form optical surface machining using an ultra-precision machine tool is a common and effective method in precision optics manufacturing. However, this method sometimes causes waviness due to the machine’s motion in mid-spatial frequency (MSF) form deviations.
Hao Duan +4 more
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The International Journal of Advanced Manufacturing Technology, 2016
On-machine measurement (OMM) involves the interruption of the machining process and the subsequent measurement of the workpiece without its removal from the machining tool. Chromatic confocal sensing is a well-known measurement technique that is able to evaluate the position of a point on an object surface along the optical axis of the system with high
Xicong Zou +4 more
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On-machine measurement (OMM) involves the interruption of the machining process and the subsequent measurement of the workpiece without its removal from the machining tool. Chromatic confocal sensing is a well-known measurement technique that is able to evaluate the position of a point on an object surface along the optical axis of the system with high
Xicong Zou +4 more
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2018 IEEE International Conference on Advanced Manufacturing (ICAM), 2018
In this paper, by moving and adjusting the collecting lens suitably, the main-lobe is moved to the position where gap between main-lobe and side-lobe is located, aimed at solving the problem of discontinuous measurement range. So that the side-lobe of the axial response can be utilized for the purpose of extending the measurement range of the ...
Chong Chen +5 more
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In this paper, by moving and adjusting the collecting lens suitably, the main-lobe is moved to the position where gap between main-lobe and side-lobe is located, aimed at solving the problem of discontinuous measurement range. So that the side-lobe of the axial response can be utilized for the purpose of extending the measurement range of the ...
Chong Chen +5 more
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2014 International Symposium on Optomechatronic Technologies, 2014
We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required.
Shin-Ichi Ueda +3 more
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We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required.
Shin-Ichi Ueda +3 more
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Optical System Design for Chromatic Confocal Displacement Probes
2023 28th International Conference on Automation and Computing (ICAC), 2023Ailin Zhang +4 more
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