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Perovskite Thin Films via Atomic Layer Deposition

Advanced Materials, 2015
Jixian Xu   +2 more
exaly  

Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 2003
exaly  

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