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Broadband Coherent Diffractive Imaging
International audienceRecent technological advances in attosecond science hold the promise of tracking electronic processes at the shortest space and time scales.
Julius Huijts +2 more
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Coherent Diffractive Imaging Methods for Semiconductor Manufacturing [PDF]
The paradigm shift of the semiconductor industry moving from deep ultraviolet to extreme ultraviolet lithography (EUVL) brought about new challenges in the fabrication of illumination and projection optics, which constitute one of the core sources of ...
Yasin Ekinci +2 more
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Coherent diffractive imaging and partial coherence
Physical Review B, 2007We formulate coherent diffractive imaging in the framework of partially spatially coherent diffraction. We find that the reconstruction can be critically dependent on the degree of coherence in the illuminating field and that even a small departure from full coherence may invalidate the conventional assumption that a mapping exists between an exit ...
Williams, Garth J. +3 more
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Dynamic sample imaging in coherent diffractive imaging
Optics Letters, 2011As the resolution in coherent diffractive imaging improves, interexposure and intraexposure sample dynamics, such as motion, degrade the quality of the reconstructed image. Selecting data sets that include only exposures where tolerably little motion has occurred is an inefficient use of time and flux, especially when detector readout time is ...
Jesse N, Clark +7 more
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Coherence and sampling requirements for diffractive imaging
Ultramicroscopy, 2004Coherent Diffractive Imaging (CDI) allows images to be reconstructed from diffraction patterns by solving the non-crystallographic phase problem for isolated nanostructures. We show that the Shannon sampling of diffraction intensities needed in CDI requires a coherence width about twice the lateral dimensions of the object, and that the linear number ...
J C H, Spence, U, Weierstall, M, Howells
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Diffractive Imaging of Nonperiodic Materials With Future Coherent X-Ray Sources
Coherent diffractive imaging using a coherent X-ray source promises to be a useful microscopic method for imaging noncrystalline objects at high spatial resolution. In this article a simple method to estimate the coherently scattered signal as a function
Pierre Thibault +2 more
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Birefringent coherent diffraction imaging
SPIE Proceedings, 2016Directional dependence of the index of refraction contains a wealth of information about anisotropic optical properties in semiconducting and insulating materials. Here we present a novel high-resolution lens-less technique that uses birefringence as a contrast mechanism to map the index of refraction and dielectric permittivity in optically ...
Karpov, Dmitry +8 more
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Progress in coherent diffraction imaging: ptychography and coherent modulation imaging
Infrared and Laser Engineering, 2019Coherent diffraction imaging(CDI) is a lensless computational imaging technique, which reconstructs the amplitude and phase of an object directly from diffraction intensity measurement by solving the phase problem using iterative algorithms. CDI can provide images at the diffraction limit resolution that is only determined by the wavelength of ...
张福才 Zhang Fucai +5 more
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Spatially correlated coherent diffractive imaging method
Applied Optics, 2018Coherent diffractive imaging (CDI) is a lensless, high-resolution imaging method that is currently under rapid development by using X-rays, visible light, or electrons. However, its inherent ambiguities and the need of a priori knowledge about objects are limiting applications based on this method.
Xulei Tao +6 more
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