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Study on Lapping and Constant-Pressure Grinding of Single-Crystal SiC

Advanced Materials Research, 2009
Silicon carbide (SiC) single crystal has many advantages comparing with silicon single crystal, such as wide band-gap, hardness and various stable physical properties at high temperature and severe chemical environments. SiC semiconductor substrate is expected to be applied to high power devices and sensor devices in the severe environments.
Mutsumi Touge
exaly   +2 more sources

A Study on Constant-Pressure Grinding with EPD Pellets

Key Engineering Materials, 2004
Hirotaka Maeda, Maeda Hirotaka
exaly   +2 more sources

Study on Precision Finishing of PCD by Constant-Pressure Grinding and UV-Polishing

Key Engineering Materials, 2009
Polycrystalline diamond (PCD) has been widely used for various cutting tools and die components making use of its hardness and wear resistance properties. The polishing method of a single crystal diamond substrate and SiC using ultraviolet irradiation was newly developed to obtain mirror-finished surfaces. Due to the long polishing time in this method,
Mutsumi Touge   +4 more
openaire   +1 more source

Ultra-precision face grinding with constant pressure, lapping kinematics, and SiC grinding wheels dressed with overlap factor

The International Journal of Advanced Manufacturing Technology, 2015
Several machining processes have been created and improved in order to achieve the best results ever accomplished in hard and difficult to machine materials. Some of these abrasive manufacturing processes emerging on the science frontier can be defined as ultra-precision grinding.
Fiocchi, Arthur Alves   +2 more
openaire   +2 more sources

Mirror grinding of silicon with EPD pellets: applying a constant pressure machining

Optifab 2003: Technical Digest, 2003
In this study, a fine abrasive grinding wheel, called EPD pellet, was fabricated and a silicon wafer was ground with constant pressure machining. Constant pressure grinding with silica EPD pellets made a mirror surface about 3.4 nmRa on the silicon wafers.
openaire   +1 more source

[Study on grinding of base metal alloys. 4. Constant pressure grinding of a Ni-Cr alloy with vitrified wheels].

Shika zairyo, kikai = Journal of the Japanese Society for Dental Materials and Devices, 1991
The grinding techniques and the constituent element of vitrified wheels suitable for a 13% Cr-Ni dental casting alloy were determined. The lever-type grinding test machine used in the previous study was modified so that a work might be ground under a constant pressure as it moved reciprocally within a short stroke along the tangential direction of a ...
O, Miyakawa   +6 more
openaire   +1 more source

[Study on grinding of base metal alloys. 5. Constant pressure grinding of a Ni-Cr alloy with electro-deposited wheels].

Shika zairyo, kikai = Journal of the Japanese Society for Dental Materials and Devices, 1991
The grinding techniques and electro-deposited wheels suitable for a 13% Cr-Ni dental casting alloy were determined. The lever-type grinding test machine modified in the previous study was used to investigate the grinding performance of experimental wheels of CBN- and diamond-particles.
O, Miyakawa   +6 more
openaire   +1 more source

Development of ultraprecision constant pressure machining system for aspherical grinding / polishing

Proceedings of JSPE Semestrial Meeting, 2002
Moriyasu, Sei   +4 more
openaire   +1 more source

A negative-pressure-based surface-compliant constant-force grinding end-effector for climbing machining robots

Robotics and Computer-Integrated Manufacturing
Zeyu Gong   +4 more
openaire   +1 more source

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