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Computational Solid Mechanics Modeling of Asperity Deformation and Pad-Wafer Contact in CMP

MRS Proceedings, 2007
ABSTRACTAsperity-scale pad deformation and dynamic pad-wafer contact area are crucial to the fundamental understanding of material removal and defect formation mechanisms in CMP. Pad asperity stress and strain are also central to characterizing pad wear rate during polishing and cut rate during conditioning.
Bo Jiang, Gregory P. Muldowney
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Mechanics and Chemistry of Solids in Sliding Contact

Langmuir, 1996
Wear behavior of coated surfaces has been studied extensively over the past 20 years. Although the behavior can be discussed in terms of classical models, it is described more completely using third-body concepts. These concepts consider the processes that take place at a moving interface : deformation and particle detachment, third-body formation and ...
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Recent Progress in Contact Mechanics Methods for Solids with Surface Roughness Using Green’s Function Molecular Dynamics

Reviews on advanced materials and technologies, 2022
In spite of importance of tribology of solids with surface roughness, there is no synthesized theory covering adhesion yet. One of the methods to describe adhesion in tribological systems is the Green's Function Molecular Dynamics (GFMD). This work aims at reviewing the most recent GFMD techniques and applications of GFMD in contact mechanics.
I. Solovyev, V. Petrenko, Y. Murugesan
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On the mechanism of partial discharges in gaseous cavities in contact with solid or liquid insulators

Proceedings of the 3rd International Conference on Conduction and Breakdown in Solid Dielectrics, 2003
A study of partial discharges (PDs) in gaseous cavities subjected to an AC voltage between dielectric surfaces, or between a metal and a dielectric, is presented. The authors present and analyze the characteristic features of discharges under AC and compare them to those obtained by J.C. Devins (1984).
P. Bezborodko, O. Lesaint, R. Tobazeon
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Mechanisms of electriciation in solid-solid contact

1958
It is precisely in this area that the greatest confusion exists. Aside from the complications produced by the action of films of moisture, electrolytic effects and/or the formation of electrolytic Helmholtz double layers, or by films of impurity, phenomena are complicated by other factors.
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Dynamic contact angles. Part VI. The mechanism of spreading in a liquid–solution–solid system

J. Chem. Soc. A, 1966
Surface-tension changes at the liquid–solution interface due to compression have been calculated by two methods for drops of carbon tetrachloride spreading over a resin (CR39) surface in solutions of sodium n-octyl sulphate. It is concluded that when a drop makes contact with the resin, solute molecules in the base of the drop are compressed into the ...
T. A. Elliott, M. Morgan
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Experimental estimation of contact conditions in problems of mechanics of a solid deformable body

Journal of Engineering Physics and Thermophysics, 1997
An experimental technique for estimating the conditions acting on the contact surfaces of mutually deformable bodies as applied to geomechanical measurements is considered.
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Effects of contact body temperature and holding time on the microstructure and mechanical properties of 7075 aluminum alloy in contact solid solution treatment

Journal of Alloys and Compounds, 2020
Abstract Contact solid solution treatment (CST) of the 7075 aluminum alloy can significantly shorten the solution time, reduce energy consumption and improve production efficiency compared with traditional heating furnace solid solution treatment (FST).
Zhiqiang Zhang, Jianhao Yu, Dongye He
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Electron and phonon mechanisms of friction in crystalline solids in atomically close contact at low temperatures

Technical Physics, 2000
Recent experimental and theoretical studies have shown that an atomically close contact between two crystalline solids can be free from friction of rest in the event that their lattice constants are incommensurate and the interaction at their interface does not exceed a certain threshold value.
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Mortar-based surface-to-surface contact algorithms in large deformation solid mechanics

2006
The mortar element method is extremely useful in a variety of settings in computational mechanics, often when the optimal connection or “tying” of dissimilarly meshed domains is desired. This paper describes the benefits of applying such methods to a more complex application: large deformation contact analysis.
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