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CVD copper metallurgy for ULSI interconnections
International Technical Digest on Electron Devices, 2002Cu selective and blanket CVD (chemical vapor deposition) and film characteristics are described for filling high-aspect-ratio via and/or contact holes for future deep submicron Cu interconnections. High-quality CVD Cu film is easily formed by using H/sub 2/ reduction of the Cu complex. Excellent planarization is obtained with via and/or contact filling
Y. Arita, N. Awaya, K. Ohno, M. Sato
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Metallurgy at KGHM Polish Copper SA
Key Engineering Materials, 2016Metallurgy of KGHM Polska Miedź S.A. is one of the world leaders in the production of copper. It is the result of high volume and quality production of copper and silver, as well as the use of modern technology direct to copper process in flash smelting furnace in HMG II. Soon this will be also the case for HMG I.
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Physical metallurgy of copper and copper-base alloys
Electrical Engineering, 1944The physical metallurgy of copper and some of its alloys is of particular interest to electrical engineers, since copper is used so widely in electric apparatus. Illustrations are given in this article of certain basic metallurgical phenomena determining properties and performance of some of the more specialized alloys with particular reference to the ...
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Prehistoric Metallurgy of Copper and Bronze
Nature, 1951Notes on the Prehistoric Metallurgy of Copper and Bronze in the Old World By H. H. Coghlan. (Pitt Rivers Museum, University of Oxford. Occasional Papers on Technology, 4.) Pp. 131 + 16 plates. (Oxford: Pitt Rivers Museum, 1951.) 15s.
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Potential environmental pollution from copper metallurgy and methods of management
Environmental Research, 2021Grzegorz Izydorczyk +2 more
exaly