Nano‐Patterned CuO Nanowire Nanogap Hydrogen Gas Sensor with Voids
Sub‐5‐ppb hydrogen (H2) detection and sub‐10‐s response and recovery times are achieved based on nano‐patterned polycrystalline CuO nanowires nanogap gas sensors with voids using electron‐beam lithography and unique annealing processes. Pre‐H2 annealing, void‐generating oxidation, and downscaled nanogap electrodes are key to improving the sensing ...
Muqing Zhao+4 more
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Yuhyun Na+15 more
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Millward F, Zysman-Colman E.
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Islam A, Ghosh P.
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