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Design and fabrication of a D33-mode piezoelectric micro-accelerometer

Microsystem Technologies, 2019
In this paper, a D33-mode piezoelectric micro-accelerometer with Pb1.1(Zr0.52Ti0.48)O3(PZT) thin film is designed, fabricated and tested. Both the polarization and deformation directions of the piezoelectric thin film are horizontal in this structure.
Ma-hui Xu   +6 more
openaire   +2 more sources

DC-biased ferroelectrets with large piezoelectric d33-coefficients

Journal of Applied Physics, 2008
The application of external dc voltages significantly increases the piezoelectric d33-coefficients of ferroelectret films and also enhances their thermal stability. In this paper, interferometric measurements and model calculations with such dc-biased ferroelectret films are reported.
J. Hillenbrand, G. M. Sessler
openaire   +1 more source

Poling effect on d33 in textured Bi0.5Na0.5TiO3-based materials

Scripta Materialia, 2013
Textured (1 − x − y)Bi0.5Na0.5TiO3–(x)BaTiO3–(y)K0.5Na0.5NbO3 ceramics have been produced by tape casting with pure-phase Bi0.5Na0.5TiO3 templates. Rietveld texture refinement was used to analyze the crystallographic preferred orientation of the fired ceramics. The effect of poling field on d33 was investigated for applied fields between 0–8 MV m−1 for
Chris M. Fancher   +2 more
openaire   +1 more source

Acoustoelectric probe for d33 measurement on piezoelectric thin films

Review of Scientific Instruments, 2003
An acoustoelectric probe capable of measuring the d33 constant of piezoelectric thin films is presented. The principle used is the direct piezoelectric effect: a mechanical stress is applied to the film surface and the subsequent voltage generated is measured and compared with a reference.
Verardi P, Craciun F
openaire   +3 more sources

Size-dependent piezoelectric coefficient d33 of PbTiO3 nanoparticles

Materials Letters, 2008
Abstract Size-dependent piezoelectric coefficient d33(D) (D shows particle diameter) for small ferroelectrics is modeled in this paper. It is found that taking account of size effect is essential in understanding piezoelectric characteristics of nanoferroelectrics.
S. Zhang, H. Li, M. Li
openaire   +1 more source

Laser Doppler vibrometry for evaluating the piezoelectric coefficient d33 on thin film

Review of Scientific Instruments, 2006
The problem of electromechanical film characterization, and, in particular, the determination of the piezoelectric activities of thin films deposited on substrates, is of fundamental importance in the development of structures for microelectromechanical system (MEMS) applications.
Herdier, R.   +4 more
openaire   +2 more sources

0–3 Piezoelectric composite film with high d33 coefficient

Sensors and Actuators A: Physical, 1998
Abstract This paper reports the influence of solvent treatment on the behaviour of 0–3 piezoelectric composite films. In our experiments, 0–3 composite piezoelectric films are prepared and treated in a solvent for a period of time, and their piezoelectric properties are measured.
Chen, Xiang-Dong   +6 more
openaire   +2 more sources

MPEC 2024-D33 : OBSERVATIONS AND ORBITS OF COMETS AND A/ OBJECTS

The Minor Planet Electronic Circulars contain information on unusual minor planets, routine data on comets and natural satellites, and occasional editorial announcements. They are published on behalf of Division F of the International Astronomical Union by the Minor Planet Center, Smithsonian Astrophysical Observatory, Cambridge, MA 02138, U.S.A.
openaire   +1 more source

A low-cost and efficient d33-mode piezoelectric tuned mass damper with simultaneously optimized electrical and mechanical tuning

Journal of Intelligent Material Systems and Structures, 2021
Jin-Yeon Kim   +2 more
exaly  

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