Results 201 to 210 of about 9,381 (249)

Design and fabrication of a D33-mode piezoelectric micro-accelerometer

Microsystem Technologies, 2019
In this paper, a D33-mode piezoelectric micro-accelerometer with Pb1.1(Zr0.52Ti0.48)O3(PZT) thin film is designed, fabricated and tested. Both the polarization and deformation directions of the piezoelectric thin film are horizontal in this structure.
Ma-hui Xu, Hui Zhou, Lin-hui Zhu, Jie-nan Shen, Yi-bo Zeng, Yong-jian Feng, Hang Guo   +6 more
openaire   +2 more sources

DC-biased ferroelectrets with large piezoelectric d33-coefficients

Journal of Applied Physics, 2008
The application of external dc voltages significantly increases the piezoelectric d33-coefficients of ferroelectret films and also enhances their thermal stability. In this paper, interferometric measurements and model calculations with such dc-biased ferroelectret films are reported.
J. Hillenbrand, G. M. Sessler
openaire   +1 more source

Poling effect on d33 in textured Bi0.5Na0.5TiO3-based materials

Scripta Materialia, 2013
Textured (1 − x − y)Bi0.5Na0.5TiO3–(x)BaTiO3–(y)K0.5Na0.5NbO3 ceramics have been produced by tape casting with pure-phase Bi0.5Na0.5TiO3 templates. Rietveld texture refinement was used to analyze the crystallographic preferred orientation of the fired ceramics. The effect of poling field on d33 was investigated for applied fields between 0–8 MV m−1 for
Chris M. Fancher, John E. Blendell, Keith J. Bowman   +2 more
openaire   +1 more source

Acoustoelectric probe for d33 measurement on piezoelectric thin films

Review of Scientific Instruments, 2003
An acoustoelectric probe capable of measuring the d33 constant of piezoelectric thin films is presented. The principle used is the direct piezoelectric effect: a mechanical stress is applied to the film surface and the subsequent voltage generated is measured and compared with a reference.
Verardi P, Craciun F
openaire   +3 more sources

Size-dependent piezoelectric coefficient d33 of PbTiO3 nanoparticles

Materials Letters, 2008
Abstract Size-dependent piezoelectric coefficient d33(D) (D shows particle diameter) for small ferroelectrics is modeled in this paper. It is found that taking account of size effect is essential in understanding piezoelectric characteristics of nanoferroelectrics.
S. Zhang, H. Li, M. Li
openaire   +1 more source

Laser Doppler vibrometry for evaluating the piezoelectric coefficient d33 on thin film

Review of Scientific Instruments, 2006
The problem of electromechanical film characterization, and, in particular, the determination of the piezoelectric activities of thin films deposited on substrates, is of fundamental importance in the development of structures for microelectromechanical system (MEMS) applications.
Herdier, R., Jenkins, D., Dogheche, El Hadj, Remiens, Denis, Sulc, M.   +4 more
openaire   +2 more sources

Lead zirconate titanate films for d33 mode cantilever actuators

Sensors and Actuators A: Physical, 2003
Abstract Piezoelectric Pb(Zr 0.52 Ti 0.48 )O 3 (PZT 52/48) cantilever actuators that operate in the d 33 mode were fabricated using surface micromaching techniques. The cantilevers are composed of a PZT thin film on a low stress silicon nitride (Si x N y ) support buffered by a layer of ZrO 2 .
Q.Q. Zhang, S.J. Gross, S. Tadigadapa, T.N. Jackson, F.T. Djuth, S. Trolier-McKinstry   +5 more
openaire   +1 more source

Verification of a model for the piezoelectric d33 coefficient of cellular electret films

Journal of Applied Physics, 2005
An existing model for the piezoelectric thickness coefficient (d33 coefficient) of cellular polymers is tested with experimental data obtained from two differently manufactured cellular polypropylene (PP) materials. The model assumes the cellular film to consist of plane parallel solid and gaseous layers charged at their interfaces.
Joachim Hillenbrand, Gerhard M. Sessler, Xiaoqing Zhang   +2 more
openaire   +1 more source

Piezoelectric d33 coefficient of cellular polypropylene subjected to expansion by pressure treatment

Applied Physics Letters, 2004
The piezoelectric activity of charged cellular polypropylene films of originally 40 and 50μm thickness can be significantly increased by thickness expansion due to an exposure to high pressure for time periods of the order of hours. After such a treatment, the d33 coefficient, measured by quasistatic and interferometric methods, is found to be as high ...
X. Zhang, J. Hillenbrand, G. M. Sessler
openaire   +1 more source

d33 mode piezoelectric diaphragm based acoustic transducer with high sensitivity

Sensors and Actuators A: Physical, 2013
Abstract This paper presents the design, fabrication, and characterization of an acoustic transducer using a piezoelectric freestanding bulk diaphragm as the sensing element. The diaphragm bearing the spiral electrode operates in d 33 mode, which allows the in-plane deformation of the diaphragm to be converted to the out-of-plane deformation and ...
Shen, Zhiyuan, Lu, Jingyu, Tan, Cheewee, Miao, Jianmin, Wang, Zhihong   +4 more
openaire   +2 more sources