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Deformable segmented mems mirror
The Journal of the Acoustical Society of America, 2005A MEMS device having a deformable segmented mirror. The mirror includes a plurality of movable segments supported on a substrate using spring vertices, each vertex having a fixed plate and one or more springs. In a representative embodiment, three springs support each movable segment, where each spring connects the movable segment to a different spring
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Conduction mode laser welding with beam shaping using a deformable mirror
Optics and Laser Technology, 2022Satyapal Mahade +2 more
exaly
Micromachined Membrane Deformable Mirrors
1999Development of adaptive optics, initiated 50 years ago with the article of Babcock [1], resulted in impressive technical and scientific results in military and astronomical applications. These results were obtained on a high price using custom-developed complex adaptive optical systems.
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