Results 241 to 250 of about 224,478 (288)

Diamond-like carbon for MEMS

Journal of Micromechanics and Microengineering, 2007
Sputter-deposited amorphous diamond-like carbon (DLC, a-C) on silicon has been investigated with respect to micro electro mechanical systems (MEMS) applications. Sputtered a-C with a content of diamond-like sp3 bonded carbon of around 25% showed a high hardness of up to 30 GPa.
Erwin Peiner, Arti Tibrewala, Ralf Bandorf, Holger Lüthje, Lutz Doering, Wolfgang Limmer   +5 more
openaire   +1 more source

Diamond-like carbon nanocomposite films

Applied Physics Letters, 2003
Diamond-like carbon (DLC) nanocomposite films were deposited at room temperature by inductively coupled plasma chemical vapor deposition using hexamethyldisilane (HMDS), hexamethyldisilazane (HMDSN), and hexamethyldisiloxane (HMDSO) precursors. High-resolution transmission electron microscopy showed that all the films contained nanoparticles.
Liang-Yih Chen, Franklin Chau-Nan Hong
openaire   +1 more source

Diamond and Diamond-Like Carbon

2013
A carbon allotrope is classified as “diamond” according to several parameters including the types of chemical bonds, type of crystal network, or range of crystal dimensionality. This chapter is a review on two major allotropes: diamond and diamond-like carbon, which are mostly produced by CVD technique.
Zahra Khalaj, Mahmood Ghoranneviss, Elnaz Vaghri, Oana Ponta   +3 more
openaire   +1 more source

Photoconductivity of Diamond-Like Carbon

MRS Proceedings, 1997
ABSTRACTWe have studied the photoconductivity in pure tetrahedral amorphous carbon (ta-C) and hydrogenated tetrahedral amorphous carbon (ta-C:H). Good photoconductive properties are demonstrated for ta-C:H, showing that the hydrogenated form of ta-C is of a higher electronic quality. Transport and recombination parameters are derived.
A. Hie, N. Conway, B. Kleinsorge, M. Rattier, J. Robertson, W. I. Milne   +5 more
openaire   +1 more source

Diamond-like carbon microoptics elements

Thin Solid Films, 2004
Micro-optic elements were fabricated by reactive sputter deposition or high density plasma chemical vapour deposition of diamond-like carbon films upon a micromachined silicon mould. The main advantages of the deposited films were: their low temperature deposition processes, their chemical inertness, their low internal stresses and the spectral range ...
Ana Paula Mousinho, Ronaldo Domingues Mansano, Giuseppe Antonio Cirino, Patrick Verdonck   +3 more
openaire   +1 more source

Diamond-like carbon — present status

Diamond and Related Materials, 1999
Abstract Hydrogen free diamond-like carbon (DLC) films have been the subject of investigation all over the world during the past 25 years due to the unique combination of their properties that can be found between those of diamond and those of graphite. Intensive work throughout the world in the past 10 years has led to a much better understanding of
openaire   +1 more source

ChemInform Abstract: Diamond‐Like Carbon.

ChemInform, 1994
AbstractChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 100 leading journals. To access a ChemInform Abstract of an article which was published elsewhere, please select a “Full Text” option. The original article is trackable via the “References” option.
openaire   +1 more source

Properties of diamond-like carbon

Surface and Coatings Technology, 1992
Abstract This paper revies the preparation and properties of hard forms of amorphous carbon and hydrogenated amorphous carbon, often known as diamond-like carbon. Properties such as the hydrogen content, sp 3 content, optical gap, refractive index, hardness, elastic modulus and friction and their dependence on the deposition conditions are described.
openaire   +1 more source

Diamond-Like Carbon Coatings

2022
Peerawatt Nunthavarawong, Sanjay Mavinkere Rangappa, Suchart Siengchin, Kuniaki Dohda   +3 more
openaire   +1 more source

Deposition of diamond-like carbon

Philosophical Transactions of the Royal Society of London. Series A: Physical and Engineering Sciences, 1993
Diamond-like carbon refers to forms of amorphous carbon and hydrogenated amorphous carbon containing a sizeable fraction of sp3bonding, which makes them mechanically hard, infrared transparent and chemically inert. This paper discusses the various thin film deposition processes used to form diamond-like carbon and the deposition mechanisms responsible ...
openaire   +1 more source