Results 11 to 20 of about 79 (46)

An automatic Q-factor matching method for eliminating 77% of the ZRO of a MEMS vibratory gyroscope in rate mode [PDF]

Microsystems & Nanoengineering
Mismatching quality factors (Q-factors) is one of the main factors causing zero-rate output (ZRO) in degenerate (DE) Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes.
Jingbo Ren, Tong Zhou, Yi Zhou, Yixuan Li, Yan Su   +4 more
doaj   +2 more sources

Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies. [PDF]

Microsyst Nanoeng
The design of the microelectromechanical system (MEMS) disc resonator gyroscope (DRG) structural topology is crucial for its physical properties and performance.
Chen C, Zhou J, Wang H, Fan Y, Song X, Xie J, Bäck T, Wang H.   +7 more
europepmc   +2 more sources

0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s) [PDF]

Microsystems and Nanoengineering, 2018
Qingsong Li, Dingbang Xiao, Ｘin Zhou   +2 more
exaly   +2 more sources

Decoupling of a Disk Resonator From Linear Acceleration Via Mass Matrix Perturbation [PDF]

, 2012
Axisymmetric microelectromechanical (MEM) vibratory rate gyroscopes are designed so the central post which attaches the resonator to the sensor case is a nodal point of the two Coriolis-coupled modes that are exploited for angular rate sensing.
Schwartz, David, M’Closkey, Robert T
core   +1 more source

Study of Methods for Microfabrication of Fused Silica Planar CVGs and Direct Angle Measurements [PDF]

, 2022
This Ph.D. dissertation focuses on developing microfabrication processes to realize planar Fused Silica (FS) Micro-Electro-Mechanical System (MEMS) technology for the implementation of Micro-Rate-Integrating Gyroscopes (MRIG). Additionally, it includes a
Vatanparvar, Daryosh
core  

Decoupling of a Disk Resonator From Linear Acceleration Via Mass Matrix Perturbation

, 2020
Axisymmetric microelectromechanical (MEM) vibratory rate gyroscopes are designed so the central post which attaches the resonator to the sensor case is a nodal point of the two Coriolis-coupled modes that are exploited for angular rate sensing.
Professor Robert T M'closkey
core  

Epitaxiallyencapsulated polysilicon disk resonator gyroscope

, 2013
We present a 0.6 mm diameter, 20 m thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed-loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.
C H Ahn, M Li, B E Boser, D A Horsley, T.-H Su, E J Ng, Z M Yang, T W Kenny, S Nitzan, S Wang, G O'brien   +10 more
core  

Design and analysis of wafer-level vacuum-encapsulated disk resonator gyroscope using a commercial MEMS process

, 2017
In this Thesis, the design and analysis of a mode-matched Disk Resonator Gyroscope (DRG) characterized by high Quality factor exceeding 1 million is presented.
Uppalapati, Balaadithya
core  

Virtual Coriolis-Force-Based Mode-Matching Micromachine-Optimized Tuning Fork Gyroscope without a Quadrature-Nulling Loop. [PDF]

Micromachines (Basel), 2023
Wu Y, Yuan W, Xue Y, Chang H, Shen Q.
europepmc   +1 more source

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies. [PDF]

Micromachines (Basel), 2022
Zhang H, Zhang C, Chen J, Li A.
europepmc   +1 more source