Results 31 to 40 of about 79 (46)
Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope. [PDF]
Sci Rep, 2015 Nitzan SH +6 more
europepmc +1 more source
A Dual-Butterfly Structure Gyroscope. [PDF]
Sensors (Basel), 2017 Xu X, Xiao D, Li W, Xu Q, Hou Z, Wu X.
europepmc +1 more source
Research on bell-shaped vibratory angular rate gyro's character of resonator. [PDF]
Sensors (Basel), 2013 Su Z, Fu M, Li Q, Liu N, Liu H.
europepmc +1 more source
Oxide-coated polysilicon disk resonator gyroscope (DRG) within the wafer-scale encapsulation process
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings, 2015 This paper reports fabrication and preliminary test results of oxide-coated polysilicon disk resonator gyroscopes (DRG) in a wafer-scale encapsulation. With this thin oxide coating, surface roughness of a fully encapsulated device was reduced by 10x, increasing the uniformity across the wafer.
C H Ahn, T W Kenny
exaly +3 more sources
On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 This paper reports, for the first time, a single-chip ovenization of a fully-encapsulated MEMS gyroscope to improve the stability of the scale factor and bias. We use the frequency output of the gyroscope as a thermometer, and, in turn heat the device through an on-chip silicon heater defined in the encapsulation layer.
C H Ahn, Wounjhang Park, T W Kenny
exaly +3 more sources
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A mode order optimized disk resonator gyroscope considering thermoelastic damping
International Journal of Mechanical Sciences, 2022Zhengcheng Qin +2 more
exaly
An In-Run Automatic Mode-Matching Method for N = 3 MEMS Disk Resonator Gyroscope
IEEE Sensors Journal, 2021Yi Zhou, Jingbo Ren, Mengxiang Liu
exaly