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A capacitive-piezoelectric hybrid MEMS microphone with signal fusion for enhancing signal-to-noise ratio. [PDF]

open access: yesMicrosyst Nanoeng
Guan Y   +10 more
europepmc   +1 more source

Frequency-angle decoupling design for grid-etched piezoelectric MEMS cantilevers and its application to quasi-static micromirrors. [PDF]

open access: yesMicrosyst Nanoeng
Xue W   +11 more
europepmc   +1 more source

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