Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate [PDF]
Micromachines, 2021 High-resolution metallic nanostructures can be fabricated with multistep processes, such as electron beam lithography or ice lithography. The gas-assisted direct-write technique known as focused electron beam induced deposition (FEBID) is more versatile ...
Luisa Berger +5 more
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Negative-tone molecular glass photoresist for high-resolution electron beam lithography [PDF]
Royal Society Open Science, 2021 A low molecular weight organic compound containing bis-phenol A backbone (BPA-6OH) is reported as a negative-tone photoresist. This material has a high glass transition temperature and excellent thermal stability.
Yafei Wang +5 more
doaj +2 more sources
Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography
Nanomaterials, 2021 This study presents the design and manufacture of metasurface lenses optimized for focusing light with 1.55 µm wavelength. The lenses are fabricated on silicon substrates using electron beam lithography, ultraviolet-nanoimprint lithography and cryogenic ...
Angela Mihaela Baracu +10 more
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Electron Beam Lithography of Magnetic Skyrmions [PDF]
Advanced Materials, 2020 AbstractThe emergence of magnetic skyrmions, topological spin textures, has aroused tremendous interest in studying the rich physics related to their topology. While skyrmions promise high‐density and energy‐efficient magnetic memory devices for information technology, the manifestation of their nontrivial topology through single skyrmions and ordered ...
Guang, Y +19 more
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In Situ Study of the Impact of Aberration-Corrected Electron-Beam Lithography on the Electronic Transport of Suspended Graphene Devices [PDF]
Nanomaterials, 2020 The implementation of aberration-corrected electron beam lithography (AC-EBL) in a 200 keV scanning transmission electron microscope (STEM) is a novel technique that could be used for the fabrication of quantum devices based on 2D atomic crystals with ...
Naomi Mizuno, Fernando Camino, Xu Du
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Macrophage-compatible magnetic achiral nanorobots fabricated by electron beam lithography [PDF]
Scientific Reports, 2022 With the development and progress of nanotechnology, the prospect of using nanorobots to achieve targeted drug delivery is becoming possible. Although nanorobots can potentially improve nano-drug delivery systems, there remains a significant challenge to
Teng Jiang +3 more
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Electron beam lithography on nonplanar and irregular surfaces [PDF]
Microsystems & NanoengineeringE-beam lithography is a powerful tool for generating nanostructures and fabricating nanodevices with fine features approaching a few nanometers in size.
Chenxu Zhu +4 more
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Strategies for Managing Charge in Electron-Beam Lithography on Glass [PDF]
PhotonicsOptical metasurfaces fabricated via electron beam lithography (EBL) are increasingly pivotal for biosensing and bioimaging applications. However, charge accumulation on insulating glass substrates persists as a critical barrier, causing distortion of the
Zhongyang Liu +5 more
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Perovskite-Compatible Electron-Beam-Lithography Process Based on Nonpolar Solvents for Single-Nanowire Devices. [PDF]
ACS Appl Nano Mater, 2022 Lamers N, Zhang Z, Wallentin J.
europepmc +2 more sources
Research on the application of thermal field emission gun in electron beam lithography
Dianzi Jishu Yingyong, 2022 The classification and characteristics of electron gun are introduced, with emphasis on the principle, structure and characteristics of thermal field emission gun and its application in electron beam lithography machine. The relationship between the beam
Hao Xiaoliang +6 more
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