Results 1 to 10 of about 228,991 (341)
Distortion Detection of Lithographic Projection Lenses Based on Wavefront Measurement
Photonics, 2023 As with the decreasing feature size prompted by Moore’s law and the continuous technological advancements in the semiconductor industry, the distortion of the projection lens is an important factor that affects the overlay.
Tian Li +8 more
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Rolling Nanoelectrode Lithography [PDF]
Micromachines, 2020 Non-uniformity and low throughput issues severely limit the application of nanoelectrode lithography for large area nanopatterning. This paper proposes, for the first time, a new rolling nanoelectrode lithography approach to overcome these challenges. A test-bed was developed to realize uniform pressure distribution over the whole contact area between ...
Hasan, Rashed Md. Murad +2 more
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Nature Communications, 2014 The rapid miniaturization of devices and machines has fuelled the evolution of advanced fabrication techniques. However, the complexity and high cost of the state-of-the-art high-resolution lithographic systems are prompting unconventional routes for nanoscale patterning. Inspired by natural nanomachines, synthetic nanomotors have recently demonstrated
Li, Jinxing +5 more
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Design concepts for broadband high–efficiency DOEs [PDF]
Journal of the European Optical Society-Rapid Publications, 2008 Several design–concepts are presented for so–called efficiency achromatized diffractive optical elements (EA–DOEs) possessing a diffraction efficiency larger than 97% over a broad spectral range.
Kleemann B. H., Seeßelberg M., Ruoff J.
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Imaging and Applied Optics 2014, 2014 This review summarises the work of the Durham-Sheffield, UK team working on Holographic Lithography over the last decade. It collates progress in 3D resolution and overall scale of the substrate wiring patterns designed and considers a range of approaches and applications.
Purvis, A. +7 more
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STARTING POINT SELECTION IN GROUPING DESIGN METHOD FOR LITHOGRAPHIC OBJECTIVES [PDF]
Научно-технический вестник информационных технологий, механики и оптики, 2019 This work aims on method development for obtaining initial designs for ultraviolet (UV) and deep-ultraviolet (DUV) objectives through global search algorithm. We studied a global search based algorithm tending to obtain the feasible local minima of lens
Nenad D. Zoric +2 more
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Results in Physics, 2020 In this study, Cu2ZnSnS4 (CZTS) nanoparticles with an average size in a range of 10–36 nm were synthesized via solvothermal synthesis using different amounts of polyvinylpyrrolidone (PVP, 3, 5, 7, and 9 mg/mL) stabilizing agent.
E.M. Mkawi +3 more
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Process for the Fabrication of Nickel Material High Aspect-ratio Digital PCR Partition [PDF]
한국정밀공학회지This paper outlines the fabrication process of the partition component, a crucial element in digital PCR. The partition component consists of thousands of micro-wells capable of holding small volumes of reagents.
GeeHong Kim +3 more
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Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective
Nanomaterials, 2021 The turn of the 21st century heralded in the semiconductor age alongside the Anthropocene epoch, characterised by the ever-increasing human impact on the environment.
Eleanor Mullen, Michael A. Morris
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Science, 2008 We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a “direct write” manner. Polymer pen lithography merges the feature size control of dip-pen nanolithography with the large-area capability of contact printing.
Giam, Louise R. +5 more
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