Results 11 to 20 of about 42,088 (263)
Design concepts for broadband high–efficiency DOEs [PDF]
Journal of the European Optical Society-Rapid Publications, 2008 Several design–concepts are presented for so–called efficiency achromatized diffractive optical elements (EA–DOEs) possessing a diffraction efficiency larger than 97% over a broad spectral range.
Kleemann B. H., Seeßelberg M., Ruoff J.
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Distortion Detection of Lithographic Projection Lenses Based on Wavefront Measurement
Photonics, 2023 As with the decreasing feature size prompted by Moore’s law and the continuous technological advancements in the semiconductor industry, the distortion of the projection lens is an important factor that affects the overlay.
Tian Li +8 more
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STARTING POINT SELECTION IN GROUPING DESIGN METHOD FOR LITHOGRAPHIC OBJECTIVES [PDF]
Научно-технический вестник информационных технологий, механики и оптики, 2019 This work aims on method development for obtaining initial designs for ultraviolet (UV) and deep-ultraviolet (DUV) objectives through global search algorithm. We studied a global search based algorithm tending to obtain the feasible local minima of lens
Nenad D. Zoric +2 more
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Process for the Fabrication of Nickel Material High Aspect-ratio Digital PCR Partition [PDF]
한국정밀공학회지This paper outlines the fabrication process of the partition component, a crucial element in digital PCR. The partition component consists of thousands of micro-wells capable of holding small volumes of reagents.
GeeHong Kim +3 more
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Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective
Nanomaterials, 2021 The turn of the 21st century heralded in the semiconductor age alongside the Anthropocene epoch, characterised by the ever-increasing human impact on the environment.
Eleanor Mullen, Michael A. Morris
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Nature Communications, 2014 The rapid miniaturization of devices and machines has fuelled the evolution of advanced fabrication techniques. However, the complexity and high cost of the state-of-the-art high-resolution lithographic systems are prompting unconventional routes for nanoscale patterning. Inspired by natural nanomachines, synthetic nanomotors have recently demonstrated
Li, Jinxing +5 more
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Innovative design of a transmission mechanism for variable speed wind turbines
Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2015 An innovative transmission mechanism, referred to here as an independently controllable transmission (ICT), for application in variable speed wind turbines is described.
Guan-Shyong HWANG, Chung-Chi LIN
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Imaging and Applied Optics 2014, 2014 This review summarises the work of the Durham-Sheffield, UK team working on Holographic Lithography over the last decade. It collates progress in 3D resolution and overall scale of the substrate wiring patterns designed and considers a range of approaches and applications.
Purvis, A. +7 more
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Methodology for Fabrication-Tolerant Planar Directional Couplers
IEEE Photonics Journal, 2022 A new methodology for realizing fabrication-tolerant planar directional couplers is proposed and experimentally demonstrated. Performance of power splitting and WDM couplers can be made highly tolerant to typical process errors when an appropriate center-
Choon Kong Lai +5 more
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Cogent Engineering, 2018 Thin films of CuGaSe were deposited on n-Si (1 0 0) by rf magnetron sputtering from a stoichiometric CuGaSe2 target. The objective of this study was to characterize the thin film/Si heterojunction for potential photovoltaic applications, evaluate ...
M. A. Awaah +8 more
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