Results 291 to 300 of about 21,175 (304)
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Fast electron-beam lithography

Microelectronics Reliability, 1982
openaire   +1 more source

Lithography gets extreme

Nature Photonics, 2010
exaly  

Resists for Electron Beam Lithography

1984
TOSHIAKI TAMAMURA   +2 more
openaire   +1 more source

Instrumentation for electron beam lithography

Microelectronics Reliability, 1975
openaire   +1 more source

Electron Beam Lithography of Nanostructures

2011
D.M. Tennant, A.R. Bleier
openaire   +1 more source

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