Results 181 to 190 of about 857,173 (193)
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Gas-assisted focused electron beam and ion beam processing and fabrication

Journal of Vacuum Science & Technology B, 2008
Ivo Utke, Patrik Hoffmann
exaly  

Proximity effect in electron‐beam lithography

Journal of Vacuum Science and Technology, 1975
exaly  

ELECTRON BEAMS

1969
openaire   +1 more source

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