Results 281 to 290 of about 245,592 (331)

Ultralow-energy focused electron beam induced deposition

Applied Physics Letters, 1994
We have studied focused electron beam induced deposition from W(CO)6 at beam primary energies between 20 and 0.06 keV. Submicrometer resolution with 4 nA beam current was maintained at very low primary energies using a retarding field configuration. Decomposition cross sections of W(CO)6 for primary energies below about 1 keV were found to be about a ...
P. C. Hoyle, J. R. A. Cleaver, H. Ahmed
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Focused electron beam induced deposition of gold

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2000
Codeposition of hydrocarbons is a severe problem during focused electron beam writing of pure metal nanostructures. When using organometallic precursors, a low metal content carbonaceous matrix embedding and separating numerous nanosized metal clusters is formed. In this work, we present a new and easy approach to obtain high purity gold lines: the use
I. Utke, P. Hoffmann, B. Dwir, K. Leifer, E. Kapon, P. Doppelt   +5 more
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Proximity Effect in Electron-Beam-Induced Deposition

Japanese Journal of Applied Physics, 2006
Beam induced deposition is versatile technique to fabricate nano-structure. In this paper, the proximity effect in electron beam induced deposition was studied, and the beam scan sequence which minimizes the effect was suggested.
Kazutaka Mitsuishi, Masayuki Shimojo, Masaki Takeguchi, Miyoko Tanaka, Kazuo Furuya   +4 more
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Focused electron beam induced deposition of nickel

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2007
Focused electron beam induced depositions of nickel-containing materials obtained by using bis(methylcyclopentadienyl)nickel(II) Ni(C5H4CH3)2 and tetrakis(trifluorophosphine)nickel(0) Ni(PF3)4 as precursors, were compared in terms of chemical composition and electrical resistivity. Ni(PF3)4 decomposed into higher Ni content materials than that obtained
A. Perentes, G. Sinicco, G. Boero, B. Dwir, P. Hoffmann   +4 more
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Electron beam induced deposition of iron nanostructures

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2008
Electron beam induced deposition is among the most prospective methods for size- and position-controllable nanofabrication of three-dimensional structures. Direct-write maskless nanostructure fabrication was performed with a scanning electron microscope.
G. Hochleitner, H. D. Wanzenboeck, E. Bertagnolli   +2 more
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A nanosized photodetector fabricated by electron-beam-induced deposition

Nanotechnology, 2009
A sensitive nanosized molybdenum oxide (MoO(x)) photodetector is manufactured at a desired position by electron-beam-induced deposition (EBID). As-deposited MoO(x) had a conductivity approximately 300 S cm(-1). After 2 h annealing at 573 K, the conductivity of nanowires decreased 10 times to approximately 30 S cm(-1) and MoO(x) had photoconductivity ...
K, Makise, K, Mitsuishi, M, Shimojo, K, Furuya   +3 more
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Electron-beam-induced deposition of gold from aqueous solutions

Nanotechnology, 2010
Focused electron-beam-induced deposition (EBID) using bulk liquid precursors is a novel approach to nanofabrication that has shown improvements in purity compared to EBID with gas-phase precursors. Here we report the first EBID of gold using bulk liquid precursors.
G, Schardein, E U, Donev, J T, Hastings
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Focused Electron Beam Induced Deposition of Gold and Rhodium

MRS Proceedings, 2000
ABSTRACTElectron beam induced deposition with two noble metal precursors (Rhodium and Gold) having the same halogeno and trifluorophosphine ligands is presented. The deposit geometry of lines and freestanding bridges is discussed with respect to electron energy, beam shape, and backscattered electron distribution.
P. Hoffmann, I. Utke, F. Cicoira, B. Dwir, K. Leifer, E. Kapon, P. Doppelt   +6 more
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Shrinking solid-state nanopores using electron-beam-induced deposition

Nanotechnology, 2009
Solid-state nanopores of only a few nanometres in size show a great potential for applications such as molecule detection and DNA sequencing. In most cases, the fabrication of such a nanopore requires the high energy beam of a transmission electron microscope (TEM) or focused ion beam (FIB) tool to drill or reshape a small hole in a freestanding ...
Ronald, Kox, Chang, Chen, Guido, Maes, Liesbet, Lagae, Gustaaf, Borghs   +4 more
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Fundamental Proximity Effects in Focused Electron Beam Induced Deposition

ACS Nano, 2011
Fundamental proximity effects for electron beam induced deposition processes on nonflat surfaces were studied experimentally and via simulation. Two specific effects were elucidated and exploited to considerably increase the volumetric growth rate of this nanoscale direct write method: (1) increasing the scanning electron pitch to the scale of the ...
Harald, Plank, Daryl A, Smith, Thomas, Haber, Philip D, Rack, Ferdinand, Hofer   +4 more
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