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Electron-beam-induced deposition of platinum at low landing energies

Journal of Vacuum Science & Technology B, 2008
Aurélien Botman, J J L Mulders
exaly  

Electron-Beam-Induced Deposition For Nanodevice Formation

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135), 1998
openaire   +1 more source

Electron beam induced deposition from W(CO)6 at 2 to 20 keV and its applications

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1996
exaly  

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