Focused electron beam-induced deposition

Results 1 to 10 of about 232 (162)

Magnetic Functionalization of Scanning Probes by Focused Electron Beam Induced Deposition Technology

Magnetochemistry, 2021
The fabrication of nanostructures with high resolution and precise control of the deposition site makes Focused Electron Beam Induced Deposition (FEBID) a unique nanolithography process.
Javier Pablo-Navarro +3 more
doaj +3 more sources

Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions

Micromachines, 2019
In this contribution, we compare the performance of Focused Electron Beam-induced Deposition (FEBID) and Focused Ion Beam-induced Deposition (FIBID) at room temperature and under cryogenic conditions (the prefix “Cryo” is used here for ...
José María De Teresa +3 more
doaj +3 more sources

Electron-Induced Decomposition of Different Silver(I) Complexes: Implications for the Design of Precursors for Focused Electron Beam Induced Deposition

Nanomaterials, 2022
Focused electron beam induced deposition (FEBID) is a versatile tool to produce nanostructures through electron-induced decomposition of metal-containing precursor molecules. However, the metal content of the resulting materials is often low.
Petra Martinović +7 more
doaj +3 more sources

Focused electron beam induced deposition: A perspective

Beilstein Journal of Nanotechnology, 2012
Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface
Michael Huth +7 more
doaj +2 more sources

Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

Beilstein Journal of Nanotechnology, 2018
Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics.
Lukas Keller, Michael Huth
doaj +2 more sources

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

Micromachines, 2020
This article reviews the state-of-the -art of mechanical material properties and measurement methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assisted focused electron and focused ion beam-induced deposition using ...
Ivo Utke +3 more
doaj +3 more sources

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Beilstein Journal of Nanotechnology, 2015
Focused electron beam induced deposition (FEBID) is a single-step, direct-write nanofabrication technique capable of writing three-dimensional metal-containing nanoscale structures on surfaces using electron-induced reactions of organometallic precursors.
Rachel M. Thorman +3 more
doaj +2 more sources

Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies

Materials for Quantum Technology, 2023
In this Perspective article, we evaluate the current state of research on the use of focused electron and ion beams to directly fabricate nanoscale superconducting devices with application in quantum technologies.
José María De Teresa
doaj +1 more source

In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum

Nanomaterials, 2022
Recent developments in nanoprinting using focused electron beams have created a need to develop analysis methods for the products of electron-induced fragmentation of different metalorganic compounds.
Jakub Jurczyk +8 more
doaj +1 more source

Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material

Micromachines, 2020
High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between the ...
Sangeetha Hari +4 more
doaj +1 more source

focused electron beam induced deposition
nanofabrication
dissociative electron attachment

febid
continuum model
dissociative ionization

focused electron beam induced deposition febid
electron beam induced deposition
3d nanoprinting