Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition [PDF]
Nanomaterials, 2023 Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution.
Jakub Jurczyk +8 more
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Low-resistivity, high-resolution W-C electrical contacts fabricated by direct-write focused electron beam induced deposition [version 1; peer review: 2 approved] [PDF]
Open Research Europe, 2022 Background: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposit is a widespread nanolithographic technique named focused ion beam induced deposition (FIBID).
Fabian Sigloch +3 more
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Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material [PDF]
Micromachines, 2020 High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between the ...
Sangeetha Hari +4 more
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Superconducting Materials and Devices Grown by Focused Ion and Electron Beam Induced Deposition [PDF]
Nanomaterials, 2022 Since its discovery in 1911, superconductivity has represented an equally inciting and fascinating field of study in several areas of physics and materials science, ranging from its most fundamental theoretical understanding, to its practical application
Pablo Orús +3 more
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A novel copper precursor for electron beam induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2018 A fluorine free copper precursor, Cu(tbaoac)2 with the chemical sum formula CuC16O6H26 is introduced for focused electron beam induced deposition (FEBID).
Caspar Haverkamp +6 more
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Modelling focused electron beam induced deposition beyond Langmuir adsorption [PDF]
Beilstein Journal of Nanotechnology, 2017 In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes.
Dédalo Sanz-Hernández +1 more
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Electron-Induced Decomposition of Different Silver(I) Complexes: Implications for the Design of Precursors for Focused Electron Beam Induced Deposition [PDF]
Nanomaterials, 2022 Focused electron beam induced deposition (FEBID) is a versatile tool to produce nanostructures through electron-induced decomposition of metal-containing precursor molecules. However, the metal content of the resulting materials is often low.
Petra Martinović +7 more
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Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2021 Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID).
Cristiano Glessi +3 more
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Focused electron beam induced deposition: A perspective
Beilstein Journal of Nanotechnology, 2012 Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface
Michael Huth +7 more
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Low-energy electron interaction and focused electron beam-induced deposition of molybdenum hexacarbonyl (Mo(CO)6) [PDF]
Beilstein Journal of Nanotechnology, 2022 Motivated by the potential role of molybdenum in semiconductor materials, we present a combined theoretical and experimental gas-phase study on dissociative electron attachment (DEA) and dissociative ionization (DI) of Mo(CO)6 in comparison to focused ...
Po-Yuan Shih +6 more
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