Results 41 to 50 of about 6,063,462 (266)

A study of the reproducibility of electron beam induced deposition for sub-20 nm lithography

open access: yesMicro and Nano Engineering, 2019
The potential of Electron Beam Induced Deposition (EBID) to become a reliable and reproducible direct-write nanopatterning technique has been investigated.
Sangeetha Hari   +3 more
doaj   +1 more source

Continuum models of focused electron beam induced processing

open access: yesBeilstein Journal of Nanotechnology, 2015
Focused electron beam induced processing (FEBIP) is a suite of direct-write, high resolution techniques that enable fabrication and editing of nanostructured materials inside scanning electron microscopes and other focused electron beam (FEB) systems ...
Milos Toth   +4 more
doaj   +1 more source

A comparison of focused ion beam and electron beam induced deposition processes

open access: yes, 2022
S.1779-1782Focused ion and electron beams are used for local deposition of conducting or insulating films. Major applications are integrated circuit design edit, prototype modification, repair of masks, and machining of microsystems.
Pauthner, S.   +5 more
core   +1 more source

A combined gas-phase dissociative ionization, dissociative electron attachment and deposition study on the potential FEBID precursor [Au(CH3)2Cl]2

open access: yesBeilstein Journal of Nanotechnology, 2023
Motivated by the potential of focused-electron-beam-induced deposition (FEBID) in the fabrication of functional gold nanostructures for application in plasmonic and detector technology, we conducted a comprehensive study on [Au(CH3)2Cl]2 as a potential ...
Elif Bilgilisoy   +7 more
doaj   +1 more source

Towards the third dimension in direct electron beam writing of silver

open access: yesBeilstein Journal of Nanotechnology, 2018
Carboxylates constitute an extremely promising class of precursor compounds for the electron beam induced deposition of silver. In this work both silver 2,2-dimethylbutyrate and silver pentafluoropropionate were investigated with respect to their dwell ...
Katja Höflich   +8 more
doaj   +1 more source

Dissociative electron attachment to gold(I)-based compounds: 4,5-dichloro-1,3-diethyl-imidazolylidene trifluoromethyl gold(I)

open access: yesFrontiers in Chemistry, 2023
With the use of proton-NMR and powder XRD (XRPD) studies, the suitability of specific Au-focused electron beam induced deposition (FEBID) precursors has been investigated with low electron energy, structure, excited states and resonances, structural ...
Maria Pintea   +7 more
doaj   +1 more source

Low secondary electron yield engineered surface for electron cloud mitigation [PDF]

open access: yes, 2014
Secondary electron yield (SEY or δ) limits the performance of a number of devices. Particularly, in high-energy charged particle accelerators, the beam-induced electron multipacting is one of the main sources of electron cloud (e-cloud) build up on the ...
Oleg B. Malyshev   +14 more
core   +1 more source

A light‐triggered Time‐Resolved X‐ray Solution Scattering (TR‐XSS) workflow with application to protein conformational dynamics

open access: yesFEBS Open Bio, EarlyView.
Time‐resolved X‐ray solution scattering captures how proteins change shape in real time under near‐native conditions. This article presents a practical workflow for light‐triggered TR‐XSS experiments, from data collection to structural refinement. Using a calcium‐transporting membrane protein as an example, the approach can be broadly applied to study ...
Fatemeh Sabzian‐Molaei   +3 more
wiley   +1 more source

Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope [PDF]

open access: yes, 2012
Lien vers la version éditeur: http://www.sciencedirect.com/science/article/pii/S0304399112000307A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Micro-scope for crystallographic orientation, strain and stress ...
BERVEILLER, Sophie   +7 more
core   +1 more source

Plasma enhanced chemical vapor deposition of nanocrystalline graphene and device fabrication development [PDF]

open access: yes, 2012
Large area growth of high quality graphene remains a challenge, and is currently dominated by chemical vapor deposition (CVD) on metal catalyst films.
Schmidt, Marek Edward
core   +1 more source

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