Electron-Induced Decomposition of Different Silver(I) Complexes: Implications for the Design of Precursors for Focused Electron Beam Induced Deposition [PDF]
Nanomaterials, 2022 Focused electron beam induced deposition (FEBID) is a versatile tool to produce nanostructures through electron-induced decomposition of metal-containing precursor molecules. However, the metal content of the resulting materials is often low.
Petra Martinović +7 more
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Focused electron beam induced deposition: A perspective [PDF]
Beilstein Journal of Nanotechnology, 2012 Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface
Michael Huth +7 more
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Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2018 Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics.
Lukas Keller, Michael Huth
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The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors [PDF]
Beilstein Journal of Nanotechnology, 2015 Focused electron beam induced deposition (FEBID) is a single-step, direct-write nanofabrication technique capable of writing three-dimensional metal-containing nanoscale structures on surfaces using electron-induced reactions of organometallic precursors.
Rachel M. Thorman +3 more
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Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material [PDF]
Micromachines, 2020 High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between the ...
Sangeetha Hari +4 more
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Low-resistivity, high-resolution W-C electrical contacts fabricated by direct-write focused electron beam induced deposition [version 1; peer review: 2 approved] [PDF]
Open Research Europe, 2022 Background: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposit is a widespread nanolithographic technique named focused ion beam induced deposition (FIBID).
Fabian Sigloch +3 more
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Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition [PDF]
Nanomaterials, 2023 Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution.
Jakub Jurczyk +8 more
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Long-Term Performance of Magnetic Force Microscopy Tips Grown by Focused Electron Beam Induced Deposition [PDF]
Sensors, 2023 High-resolution micro- and nanostructures can be grown using Focused Electron Beam Induced Deposition (FEBID), a direct-write, resist-free nanolithography technology which allows additive patterning, typically with sub-100 nm lateral resolution, and down
Alix Tatiana Escalante-Quiceno +4 more
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Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2021 Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID).
Cristiano Glessi +3 more
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Low-energy electron interaction and focused electron beam-induced deposition of molybdenum hexacarbonyl (Mo(CO)6) [PDF]
Beilstein Journal of Nanotechnology, 2022 Motivated by the potential role of molybdenum in semiconductor materials, we present a combined theoretical and experimental gas-phase study on dissociative electron attachment (DEA) and dissociative ionization (DI) of Mo(CO)6 in comparison to focused ...
Po-Yuan Shih +6 more
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