Results 21 to 30 of about 8,377,275 (245)

Focused electron beam induced deposition of gold

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2000
Codeposition of hydrocarbons is a severe problem during focused electron beam writing of pure metal nanostructures. When using organometallic precursors, a low metal content carbonaceous matrix embedding and separating numerous nanosized metal clusters ...
Dwir, B., Leifer, K., Kapon, E., Utke, I., Hoffmann, P., Doppelt, P.   +5 more
core   +3 more sources

Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions

Micromachines, 2019
In this contribution, we compare the performance of Focused Electron Beam-induced Deposition (FEBID) and Focused Ion Beam-induced Deposition (FIBID) at room temperature and under cryogenic conditions (the prefix “Cryo” is used here for ...
José María De Teresa, Pablo Orús, Rosa Córdoba, Patrick Philipp   +3 more
doaj   +3 more sources

Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition [PDF]

Beilstein Journal of Nanotechnology, 2017
The ability of electrons and atomic hydrogen (AH) to remove residual chlorine from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated.
Julie A. Spencer, Michael Barclay, Miranda J. Gallagher, Robert Winkler, Ilyas Unlu, Yung-Chien Wu, Harald Plank, Lisa McElwee-White, D. Howard Fairbrother   +8 more
doaj   +2 more sources

A comparison of focused ion beam and electron beam induced deposition processes

Microelectronics Reliability, 2022
S.1779-1782Focused ion and electron beams are used for local deposition of conducting or insulating films. Major applications are integrated circuit design edit, prototype modification, repair of masks, and machining of microsystems.
Pauthner, S., Lipp, S., Frey, L., Demm, C., Ryssel, H., Lehrer, C.   +5 more
core   +2 more sources

Focused electron beam induced deposition of nickel [PDF]

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2007
Focused electron beam induced depositions of nickel-containing materials obtained by using bis(methylcyclopentadienyl)nickel(II) Ni(C5H4CH3)(2) and tetrakis(trifluorophosphine)nickel(0) Ni(PF3)(4) as precursors, were compared in terms of chemical ...
Dwir, B., Perentes, A., Boero, G., Hoffmann, P., Sinicco, G.   +4 more
core   +3 more sources

Magnetic characterization of cobalt nanowires and square nanorings fabricated by focused electron beam induced deposition [PDF]

Beilstein Journal of Nanotechnology, 2018
The magnetic properties of nanowires (NWs) and square nanorings, which were deposited by focused electron beam induced deposition (FEBID) of a Co carbonyl precursor, are studied using off-axis electron holography (EH), Lorentz transmission electron ...
Federico Venturi, Gian Carlo Gazzadi, Amir H. Tavabi, Alberto Rota, Rafal E. Dunin-Borkowski, Stefano Frabboni   +5 more
doaj   +2 more sources

Synthesis of [{AgO2CCH2OMe(PPh3)}n] and theoretical study of its use in focused electron beam induced deposition [PDF]

Beilstein Journal of Nanotechnology, 2017
The synthesis, chemical and physical properties of [{AgO2CCH2OMe}n] (1) and [{AgO2CCH2OMe(PPh3)}n] (2) are reported. Consecutive reaction of AgNO3 with HO2CCH2OMe gave 1, which upon treatment with PPh3 produced 2.
Jelena Tamuliene, Julian Noll, Peter Frenzel, Tobias Rüffer, Alexander Jakob, Bernhard Walfort, Heinrich Lang   +6 more
doaj   +2 more sources

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

Micromachines, 2020
This article reviews the state-of-the -art of mechanical material properties and measurement methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assisted focused electron and focused ion beam-induced deposition using ...
Ivo Utke, Johann Michler, Robert Winkler, Harald Plank   +3 more
doaj   +3 more sources

Multiscale simulation of the focused electron beam induced deposition process. [PDF]

Sci Rep, 2020
AbstractFocused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack of molecular-level understanding of the underlying irradiation-driven chemistry (IDC).
de Vera P, Azzolini M, Sushko G, Abril I, Garcia-Molina R, Dapor M, Solov'yov IA, Solov'yov AV.   +7 more
europepmc   +9 more sources

Focused ion and electron beam induced deposition of magnetic nanostructures

, 2012
Focused electron beam and focused ion beam (FEB/FIB) induced deposits using organometallic precursors usually exhibit various levels of carbon and oxygen contamination and relatively low metallic concentrations, which affects the electrical transport ...
Fernández-Pacheco, Amalio (author), De Teresa, Jose María (author), Gabureac, Mihai S. (author), Utke, Ivo (author), Bernau, Laurent (author)   +4 more
core   +3 more sources