Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments [PDF]
Beilstein Journal of Nanotechnology, 2015 The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are ...
Francesc Salvat-Pujol +2 more
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Simulation of electron transport during electron-beam-induced deposition of nanostructures [PDF]
Beilstein Journal of Nanotechnology, 2013 We present a numerical investigation of energy and charge distributions during electron-beam-induced growth of tungsten nanostructures on SiO2 substrates by using a Monte Carlo simulation of the electron transport. This study gives a quantitative insight
Francesc Salvat-Pujol +2 more
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The role of electron-stimulated desorption in focused electron beam induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2013 We present the results of our study about the deposition rate of focused electron beam induced processing (FEBIP) as a function of the substrate temperature with the substrate being an electron-transparent amorphous carbon membrane.
Willem F. van Dorp +3 more
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Electron beam induced deposition of silacyclohexane and dichlorosilacyclohexane: the role of dissociative ionization and dissociative electron attachment in the deposition process [PDF]
Beilstein Journal of Nanotechnology, 2017 We present first experiments on electron beam induced deposition of silacyclohexane (SCH) and dichlorosilacyclohexane (DCSCH) under a focused high-energy electron beam (FEBID).
Ragesh Kumar T P +4 more
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In situ growth optimization in focused electron-beam induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2013 We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID).
Paul M. Weirich +3 more
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Precursor sticking coefficient determination from indented deposits fabricated by electron beam induced deposition [PDF]
Beilstein Journal of NanotechnologyA fast simulation approach for focused electron beam induced deposition (FEBID) numerically solves the diffusion–reaction equation (continuum model) of the precursor surface on the growing nanostructure in conjunction with a Monte Carlo simulation for ...
Alexander Kuprava, Michael Huth
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Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2018 Fabrication of three-dimensional (3D) nanoarchitectures by focused electron beam induced deposition (FEBID) has matured to a level that highly complex and functional deposits are becoming available for nanomagnetics and plasmonics.
Lukas Keller, Michael Huth
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The rational design of a Au(I) precursor for focused electron beam induced deposition [PDF]
Beilstein Journal of Nanotechnology, 2017 Au(I) complexes are studied as precursors for focused electron beam induced processing (FEBIP). FEBIP is an advanced direct-write technique for nanometer-scale chemical synthesis.
Ali Marashdeh +6 more
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Water-assisted purification during electron beam-induced deposition of platinum and gold [PDF]
Beilstein Journal of NanotechnologyDirect fabrication of pure metallic nanostructures is one of the main aims of focused electron beam-induced deposition (FEBID). It was recently achieved for gold deposits by the co-injection of a water precursor and the gold precursor Au(tfac)Me2.
Cristiano Glessi +2 more
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Beilstein Journal of Nanotechnology, 2015 Focused electron beam induced deposition (FEBID) is a single-step, direct-write nanofabrication technique capable of writing three-dimensional metal-containing nanoscale structures on surfaces using electron-induced reactions of organometallic precursors.
Rachel M. Thorman +3 more
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