Results 61 to 70 of about 245,592 (331)
A study of the reproducibility of electron beam induced deposition for sub-20 nm lithography
Micro and Nano Engineering, 2019 The potential of Electron Beam Induced Deposition (EBID) to become a reliable and reproducible direct-write nanopatterning technique has been investigated.
Sangeetha Hari +3 more
doaj +1 more source
Chemistry of Materials, 2019 Area-selective atomic layer deposition (ALD) of ZnO was achieved on SiO2 seed layer patterns on Hterminated silicon substrates, using diethylzinc (DEZ) as the zinc precursor and H2O as the coreactant.
A. Mameli +7 more
semanticscholar +1 more source
Three-Dimensional Optical Transformer - Highly Efficient Nanofocusing Device [PDF]
, 2010 Using electron-beam-induced deposition and focused-ion-beam milling, we have fabricated and demonstrated a nanofocusing optical transformer with a 3-dimensionally tapered tip.
Bokor, Jeffrey +7 more
core +1 more source
Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators
ACS Applied Nano Materials, 2019 While many plasmonic phenomena have been realized using standard nanoscale synthesis in a single 2 dimensional plane, enhanced functionality should be possible by extending into the third dimension.
Grace Pakeltis +10 more
semanticscholar +1 more source
The role of electron-stimulated desorption in focused electron beam induced deposition
Beilstein Journal of Nanotechnology, 2013 We present the results of our study about the deposition rate of focused electron beam induced processing (FEBIP) as a function of the substrate temperature with the substrate being an electron-transparent amorphous carbon membrane.
Willem F. van Dorp +3 more
doaj +1 more source
Gas-mediated charged particle beam processing of nanostructured materials [PDF]
, 2014 Gas mediated processing under a charged particle (electron or ion) beam enables direct-write, high resolution surface functionalization, chemical dry etching and chemical vapor deposition of a wide range of materials including catalytic metals ...
Aharonovich, I +5 more
core +1 more source
Acta Materialia, 2019 Focused Electron Beam Induced Deposition is a consolidated technique for the growth of three-dimensional (3D) nanostructures. However, this single-step nanofabrication method requires further efforts to optimize simultaneously dimensional and ...
Javier Pablo-Navarro +5 more
semanticscholar +1 more source
Pure Platinum Nanostructures Grown by Electron Beam Induced Deposition [PDF]
ACS Applied Materials & Interfaces, 2013 Platinum has numerous applications in catalysis, nanoelectronics, and sensing devices. Here we report a method for localized, mask-free deposition of high-purity platinum that employs a combination of room-temperature, direct-write electron beam induced deposition (EBID) using the precursor Pt(PF3)4, and low temperature (≤400 °C) postgrowth annealing ...
Chris, Elbadawi +2 more
openaire +2 more sources
Electrochemical electron beam lithography: Write, read, and erase metallic nanocrystals on demand. [PDF]
, 2017 We develop a solution-based nanoscale patterning technique for site-specific deposition and dissolution of metallic nanocrystals. Nanocrystals are grown at desired locations by electron beam-induced reduction of metal ions in solution, with the ions ...
Kodambaka, Suneel +3 more
core +1 more source
Beilstein Journal of Nanotechnology, 2023 Motivated by the potential of focused-electron-beam-induced deposition (FEBID) in the fabrication of functional gold nanostructures for application in plasmonic and detector technology, we conducted a comprehensive study on [Au(CH3)2Cl]2 as a potential ...
Elif Bilgilisoy +7 more
doaj +1 more source