Results 111 to 120 of about 1,012 (213)
A low-power-consumption out-of-Plane electrothermal actuator
This paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam.
Casals Terré, Jasmina +5 more
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, 2015 © 2013, Springer-Verlag Berlin Heidelberg. This paper reports on a novel thermal actuator with sub-micron metallic structures and a buckling arm to operate with low voltages and to generate very large deflections, respectively.
So, Hongyun, Pisano, Albert P.
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Soft Electrothermal Meta-Actuator for Robust Multifunctional Control
CoRRSoft electrothermal actuators are of great interest in diverse application domains for their simplicity, compliance, and ease of control. However, the very nature of thermally induced mechanical actuation sets inherent operation constraints: unidirectional motion, environmental sensitivity, and slow response times limited by passive cooling.
Hanseong Jo +4 more
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Novel in-plane electrothermal actuator for MEMS-based pitch-tunable diffraction grating
This thesis reports the development of novel electrothermal actuators with large in-plane displacement at comparatively low power consumption, enabling MEMS-based Pitch-tunable Diffraction Grating (MPDG) for beam steering applications.
Ho, Yen Nee
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FEM assisted design and simulation of novel electrothermal actuators [PDF]
, 2003 In this work the authors present the design, simulation, and experimental results of novel electrothermal actuators, such as the trimorph actuator for out-of-plane motion, the coupled in-plane actuator for in-plane motion and an actuator providing ...
Krijnen, G. +4 more
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Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS Actuator [PDF]
International Journal of Advanced Design and Manufacturing Technology, 2017 Microgrippers can be effectively applied for handling, positioning and assembling of the micro components. In the present study, a new design of a U-shape electrothermal microgripper was fabricated and developed with the voltages correspond between 1 to ...
M. Kolahdoozan +2 more
doaj
Shape programming of polymeric based electrothermal actuator (ETA) via artificially induced stress relaxation. [PDF]
Sci Rep, 2019 Sun YC +4 more
europepmc +1 more source
Deep X-ray lithography using mask with integrated electrothermal actuator
, 2005 We present a deep X-ray mask with integrated bent-beam electrothermal actuator for the fabrication of 3D microstructures with curved surface. The mask absorber is electroplated on the shuttle mass, which is supported by a pair of 20-mu m-thick single ...
Lee, Seung Seob, Lee, KC
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Small StructuresWearable haptic interfaces enhance human–machine interaction by delivering tactile cues for object manipulation, touchscreen interaction, and remote‐control tasks.
Hyunsoo Kim +6 more
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Electrothermal Actuators for SiO₂ Photonic MEMS.
MicromachinesThis paper describes the design, fabrication and characterization of electrothermal bimorph actuators consisting of polysilicon on top of thick (>10 μ m ) silicon dioxide beams. This material platform enables the integration of actuators with photonic waveguides, producing mechanically-flexible photonic waveguide structures that are positionable. These
Tjitte-Jelte, Peters, Marcel, Tichem
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