A Novel On-chip Three-dimensional Micromachined Calorimeter with Fully Enclosed and Suspended Thin-film Chamber for Thermal Characterization of Liquid Samples [PDF]
, 2014 A microfabricated calorimeter (μ-calorimeter) with an enclosed reaction chamber is presented. The 3D micromachined reaction chamber is capable of analyzing liquid samples with volume of 200 nl. The thin film low-stress silicon nitride membrane is used to
Arpaci V. S. +4 more
core +2 more sources
Flexible Microfabrication on a Chip during Cultivation for a Neuronal Network Direction Control Using Stepwise Photo-Thermal Etching of an Agarose Architecture [PDF]
, 2021 Yuhei Tanaka +3 more
openalex +1 more source
Advanced Materials Technologies, EarlyView.This review explores recent advances in digital micromirror device (DMD)‐based lithography, focusing on its programmable light modulation, multi‐material compatibility, and dimensional patterning strategies. It highlights innovations from optical system design to materials integration and multifunctional applications, positioning DMD lithography as a ...
Yubin Lee +5 more
wiley +1 more source
Development of interconnected silicon micro-evaporators for the on-detector electronics cooling of the future ITS detector in the ALICE experiment at LHC [PDF]
, 2014 This paper was presented at the 4th Micro and Nano Flows Conference (MNF2014), which was held at University College, London, UK. The conference was organised by Brunel University and supported by the Italian Union of Thermofluiddynamics, IPEM, the ...
4th Micro and Nano Flows Conference (MNF2014) +8 more
core
Xenon Difluoride Dry Etching for the Microfabrication of Solid Microneedles as a Potential Strategy in Transdermal Drug Delivery (Small 27/2023) [PDF]
, 2023 İsmail Eş +3 more
openalex +1 more source
Printed 2.5D‐Microstructures with Material‐Specific Functionalization for Tunable Biosensing
Advanced Materials Technologies, EarlyView.The 2.5D‐MiSENSE platform integrates a microstructured biosensor with an in‐line milking pipeline to enable real‐time detection of mastitis biomarkers during active milk flow. The system uses a 2.5D microengineered surface and patterned electrodes to enhance milk–sensor interaction.
Matin Ataei Kachouei +2 more
wiley +1 more source
Review of plasma etching processes for III-V semiconductorsMendeley Data
Micro and Nano EngineeringThis paper provides a comprehensive literature review and analysis of III-V semiconductor plasma etching, highlighting key etching considerations and providing literature references to inform future process development. Plasma etching processes for III-V
Alison Clarke +3 more
doaj +1 more source
New fabrication techniques for high quality photonic crystals [PDF]
, 1997 We have developed new methods for the fabrication of high quality two-dimensional (2D) and three-dimensional (3D) photonic crystals. These techniques involve anisotropic etching and steam oxidation of AlAs mask layers.
Cheng, Chuan C. +5 more
core +1 more source
Advanced Materials Technologies, EarlyView.Using two‐photon polymerization of SU‐8 together with mold processing allowed the creation of defect‐free, flexible 3D microfluidic structures with sub‐micrometer precision in CYTOP. The fabricated CYTOP microfluidic chips enabled super‐resolution imaging of cancer cells in the microchannels, clearly visualizing previously undetectable fine structural ...
Koji Sugioka +16 more
wiley +1 more source
Advanced Materials Technologies, EarlyView.Roll‐to‐roll direct‐current sputtering enables room‐temperature manufacture of flexible bismuth telluride thermoelectric films. By identifying a low‐power deposition window that suppresses charge‐induced arcing, this work links sputtering conditions to film structure, charge transport, and thermoelectric performance, achieving a room‐temperature figure
Xudong Tao +5 more
wiley +1 more source