Results 81 to 90 of about 18,262 (225)

Impact of open de-ionized water thin film laminar immersion on the liquid immersed ablation threshold and ablation rate of features machined by KrF excimer laser ablation of bisphenol A polycarbonate [PDF]

, 2009
Debris control and surface quality are potential major benefits of sample liquid immersion when laser micromachining; however, the use of an immersion technique potentially modifies the ablation mechanism when compared to an ambient air interaction.
C.F. Dowding, Cooper, Dowding, Dyer, Elaboudi, Elaboudi, Elaboudi, Fabbro, Gray, Hecht, J. Lawrence, Kelly, Lee, Lemoine, Louden, Parvin, Prasad, Xu, Xu, Xu, Yang, Yung, Zangeneh, Zhu   +23 more
core   +2 more sources

Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

Optics Express, 2003
We report on the microfabrication of continuous aspherical optical surfaces with a single-mask process, using anisotropic etching of silicon in a KOH water solution. Precise arbitrary aspherical surfaces with lateral scales on the order of several millimeters and a profile depth on the order of several micrometers were fabricated using this process. We
D W, de Lima Monteiro, O, Akhzar-Mehr, P M, Sarro, G, Vdovin   +3 more
openaire   +2 more sources

A Pressure Microsensor Made of Parylene‐C for Use as Medical Implant

Advanced Materials Technologies, EarlyView.
A monolithic parylene‐C pressure sensor with gold strain gauges provides 6.2 μV$\mu{\rm V}$·mmHg$\cdot{\rm mmHg}$−1$^{-1}$ sensitivity. The morphology of a sputtered thin film strain sensor is granular/columnar, which results in a high gauge factor of 7.5. Thermal bonding and parylene‐C coating create a hermetic cavity.
Ann‐Kathrin Klein, Victor Krajka, Andreas Dietzel   +2 more
wiley   +1 more source

Rapid and mask-less laser-processing technique for the fabrication of microstructures in polydimethylsiloxane

, 2014
We report a rapid laser-based method for structuring polydimethylsiloxane (PDMS) on the micron-scale. This mask-less method uses a digital multi-mirror device as a spatial light modulator to produce a given spatial intensity pattern to create arbitrarily
Butement, J., Eason, R.W., Feinäugle, M., Katis, I.N., Mills, B., Mosayyebi, Ali, Sones, C.L.   +6 more
core   +1 more source

Method to make a single-step etch mask for 3D monolithic nanostructures [PDF]

, 2015
Current nanostructure fabrication by etching is usually limited to planar structures as they are defined by a planar mask. The realisation of three-dimensional (3D) nanostructures by etching requires technologies beyond planar masks.
Grishina, D. A., Harteveld, C. A. M., Vos, W. L., Woldering, L. A.   +3 more
core   +3 more sources

Tunable Extraordinary Optical Transmission in the Long‐Wavelength Infrared Range Using Electrostatic MEMS Actuation

Advanced Materials Technologies, EarlyView.
A MEMS‐integrated metamaterial filter enables continuous, low‐voltage spectral tuning in the long‐wavelength infrared (LWIR). The device employs extraordinary optical transmission in a dual suspended metasurface stack, where electrostatic actuation precisely controls the intermembrane air gap.
Oleg Bannik, Fedor Kovalev, Michal Zawierta, Dilusha Silva, Lorenzo Faraone, Ilya Shadrivov, Mariusz Martyniuk   +6 more
wiley   +1 more source

Three-dimensional femtosecond laser nanolithography of crystals [PDF]

, 2019
Nanostructuring hard optical crystals has so far been exclusively feasible at their surface, as stress induced crack formation and propagation has rendered high precision volume processes ineffective. We show that the inner chemical etching reactivity of
A Banerjee, Airán Ródenas, Ajoy K. Kar, DE Zelmon, DR Smith, E Yablonovitch, EG Gamaly, EN Glezer, G Zhou, Giacomo Corrielli, J Basterfield, J Bauer, J Fischer, J Schindelin, JC Knight, JD Joannopoulos, JG Rarity, JK Gansel, JM Dudley, K Jain, K McGarvey-Lechable, LR Meza, M Deubel, M Hermatschweiler, M Straub, MD Henry, Min Gu, P Russell, Petra Paiè, RA Shelby, RJA Francis-Jones, Roberto Osellame, S John, S Juodkazis, S Juodkazis, S Maruo, S Wong, Sajeev John, T Clausnitzer, TJ Kippenberg   +39 more
core   +2 more sources

Micromachined Double‐Membrane Mechanically Tunable Metamaterial for Thermal Infrared Filtering

Advanced Photonics Research, Volume 6, Issue 5, May 2025.
Herein, a mechanically tunable double‐layer plasmonic metamaterial leveraging the extraordinary optical transmission effect observed in subwavelength arrays of openings within thin metal layers is presented. The concept is experimentally validated by integrating the proposed metamaterial structure into an electrostatic parallel‐plate actuator to create
Oleg Bannik, Fedor Kovalev, Mingkai Liu, Michal Zawierta, Dilusha Silva, Lorenzo Faraone, Mariusz Martyniuk, Ilya Shadrivov   +7 more
wiley   +1 more source

Review of plasma etching processes for III-V semiconductorsMendeley Data

Micro and Nano Engineering
This paper provides a comprehensive literature review and analysis of III-V semiconductor plasma etching, highlighting key etching considerations and providing literature references to inform future process development. Plasma etching processes for III-V
Alison Clarke, Maxime Darnon, Karin Hinzer, Mathieu de Lafontaine   +3 more
doaj   +1 more source

On–Off Switchable Micromotors for Use in Steerable Microvehicles

Advanced Robotics Research, EarlyView.
Electrically controllable micromotors and microvehicles are developed by tuning the diffusion of the fuel. Self‐propelled micromotors using bubble propulsion show great promise for miniaturized devices with multiuse purposes such as cargo delivery and sensing. However, there is currently no method to electrically switch the micromotors on or off. Here,
Hugo Severinsson, Eswaran Murugasen, Jose G. Martinez, Edwin W. H. Jager   +3 more
wiley   +1 more source