Applications of Dry Film Photoresist in Micromachining: A Review [PDF]
Dry film photoresist (DFR) is a solid photosensitive resin film that enables multilayer lamination and rapid patterning at relatively low temperatures.
Min Zhang +3 more
doaj +2 more sources
Micromachining – Review of Literature from 1980 to 2010 [PDF]
Trend of miniaturization of products and consequently its components nowadays can be evident in almost every production field. To accomplish requirements imposed by miniaturization micromachining proved to be a satisfied manufacturing technique.
Zdenka Keran +2 more
doaj +2 more sources
Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining [PDF]
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls.
Cheng, Ya +7 more
core +2 more sources
High-Quality Manufacturing with Electrochemical Jet Machining (ECJM) for Processing Applications: A Comprehensive Review, Challenges, and Future Opportunities [PDF]
The enduring manufacturing goals are increasingly shifting toward ultra-precision manufacturing and micro-nano fabrication, driven by the demand for sophisticated products.
Yong Huang +5 more
doaj +2 more sources
Research Progress on Micromachining Technologies Used to Fabricate Terahertz Micro-Metallic Rectangular Cavity Structures [PDF]
Terahertz metal rectangular cavity structures are widely used in terahertz devices due to their performance advantages, and various microfabrication techniques have been applied to the manufacturing of their high performance.
Xiaolei Bi +3 more
doaj +2 more sources
Femtosecond Beam Transformation Effects in Water, Enabling Increased Throughput Micromachining in Transparent Materials [PDF]
Femtosecond lasers are widely applied in scientific and industrial fields. Recent trends in the laser market show decreasing prices for femtosecond units, which will ultimately lead to the opening of new markets that were inaccessible in the past due to ...
Simas Butkus +5 more
doaj +2 more sources
Excimer Laser Three-Dimensional Micromachining Based on Image Projection and the Optical Diffraction Effect [PDF]
An excimer laser three-dimensional (3D) micromachining system is proposed based on a mask image projection method and the optical diffraction effect. The effects of optical diffraction on the laser machining rate are evaluated using a hole-arrayed mask ...
Yu-Hsuan Hung +2 more
doaj +2 more sources
Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining
Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much research
K M Tanvir Ahmmed, Anne-Marie Kietzig
exaly +3 more sources
Influence of the radius of the generatrix of flank surface on the geometric parameters of the cutting wedge of the twist drill [PDF]
Drills with various flank surface shapes are widely used to machine holes. Drill teeth have flank surfaces of various shapes, flat, conical and helical.
Pivkin Petr +3 more
doaj +1 more source
Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures [PDF]
We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK.
Baar, J.J.J. van +7 more
core +16 more sources

