Micromachining of buried micro channels in silicon [PDF]
, 2000 A new method for the fabrication of micro structures for fluidic applications, such as channels, cavities, and connector holes in the bulk of silicon wafers, called buried channel technology (BCT), is presented in this paper.
Berenschot, J.W. (Erwin) +7 more
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Experimental Investigation of Stainless Steel SAE304 Laser Engraving Cutting Conditions
Machines, 2018 Laser machining processes are a new entrant and a rapidly evolving type of non-conventional machining process which allows the machining of complex geometries with high precision, surface quality and productivity in a wide range of materials.
Evangelos Nikolidakis +2 more
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Metals, 2021 Surface roughness and burr formation are among the most important surface quality metrics which determine the quality of the fabricated parts. High precision machined microparts with complex features require micromachining process to achieve the desired ...
Atif Muhammad +4 more
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Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition and single-crystal diamond micro tools [PDF]
, 2010 Insufficient experimental data from various micro tools limit industrial application of the micromilling process. This paper presents an experimental comparative investigation into micromilling of oxygen-free, high-conductivity copper using tungsten ...
Cheng, K, Huo, D
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Optofluidic Micromachined Platform for Refractive Index Measurement
Chemosensors, 2022 We present a combination of micromachined optofluidic platforms equipped with a fiber-optic sensing configuration based on a three-path Mach–Zehnder interferometer (MZI) for simultaneous measurement of the refractive index of liquids and the ...
Zoran Djinović +2 more
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Investigation of the effects of machining parameters on surface integrity in micromachining
Open Chemistry, 2022 In this study, the effect of cutting conditions on surface integrity was investigated in micromilling of magnesium alloy (AZ91). Microtool diameter, cutting speed, feed rate, and depth of cut parameters are used.
Etyemez Ayhan, Aydin Umut
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Crystals, 2022 Functional wetting surfaces have excellent prospects in applications including self-cleaning, anti-fog, anti-icing, corrosion resistance, droplet control, and friction power generation.
Yang Liu +8 more
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Multiphysics simulation of piezoresistive pressure microsensor using finite element method [PDF]
FME Transactions, 2021 In this study, the electro-mechanical behavior of a specially designed highsensitive piezoresistor pressure microsensor was simulated using finite element method, through COMSOL multiphysics software.
Pashmforoush Farzad
doaj
Effects of closed immersion filtered water flow velocity on the ablation threshold of bisphenol A polycarbonate during excimer laser machining [PDF]
, 2010 A closed flowing thick film filtered water immersion technique ensures a controlled geometry for both the optical interfaces of the flowing liquid film and allows repeatable control of flow-rate during machining.
Dowding, Colin +2 more
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Laser Micromachining of Glass, Silicon, and Ceramics
Advances in Materials Science and Engineering, 2015 A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace.
L. Rihakova, H. Chmelickova
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