Results 31 to 40 of about 52,116 (289)
Surface micromachined membranes for tunnel transducers [PDF]
, 1997 We have developed low-temperature surface micromachining procedures for the fabrication of suspended SiO2/Si3N4 membranes. This fabrication method was integrated with electron beam lithography, anisotropic ion etching, and electroplating to construct ...
George, Thomas +2 more
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Micromachines, 2015 Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples.
Simas Butkus +7 more
doaj +1 more source
Surface micromachined mechanisms and micromotors [PDF]
, 1991 Electric micromotors are sub-millimeter sized actuators capable of unrestrained motion in at least one degree of freedom. Polysilicon surface micromachining using heavily phosphorus-doped LPCVD polysilicon for the structural material, LPCVD silicon ...
Mehregany, Mehran, Tai, Yu-Chong
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Molecules, 2014 Glutamate sensors based on the immobilization of glutamate oxidase (GlutOx) were prepared by adsorption on electrodeposited chitosan (Method 1) and by crosslinking with glutaraldehyde (Method 2) on micromachined platinum microelectrodes.
Tina T.-C. Tseng +2 more
doaj +1 more source
Note: femtosecond laser micromachining of straight and linearly tapered capillary discharge waveguides [PDF]
, 2011 Gas-filled capillary discharge waveguides are important structures in laser-plasma interaction applications, such as the laser wakefield accelerator. We present the methodology for applying femtosecond laser micromachining in the production of capillary ...
Abu-Azoum, Salima Saleh +7 more
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Micro Metal Additive Manufactured Low-Loss Slotted Rectangular Waveguides Operating at 220-500 GHz
Frontiers in Physics, 2021 This paper reports the design, fabrication and measurement techniques for a set of low-loss slotted waveguides. The waveguides are fabricated based on a micro metal additive manufacturing technology.
Zixian Wu +7 more
doaj +1 more source
Micromachining of electret materials, advantages and possibilities [PDF]
, 1988 A process is described for the micromachining of organic electret materials like Teflon FEP (fluorinated ethylene propylene). The authors have used photolithography and plasma etching, by which electrets can be etched selectively.
Bergveld, P., Voorthuyzen, J.A.
core +3 more sources
Optical Sensor, Based on an Accelerometer, for Low-Frequency Mechanical Vibrations
Micromachines, 2022 This article documents the design, manufacture, and testing of a silicon inertial optical sensor for low-frequency (lower than 2 kHz) applications. Three accelerometer designs optimized by parameterization using Finite Element Analysis were considered ...
Rodolfo Sánchez-Fraga +5 more
doaj +1 more source
Photonics, 2017 The current demand for fabricating optical and photonic devices displaying high performance, using low-cost and time-saving methods, prompts femtosecond (fs)-laser processing as a promising methodology.
Daniel S. Correa +5 more
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Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array
Sensors, 2021 Piezoelectric micromachined ultrasonic transducers (PMUT) are promising elements to fabricate a two-dimensional (2D) array with a pitch small enough (approximately half wavelength) to form and receive arbitrary acoustic beams for medical imaging. However,
Xu-Bo Wang +7 more
doaj +1 more source