Results 241 to 250 of about 194,573 (265)

Challenges of Semiconductor Microfabrication Technology for 3D Chiplet Integration

CPMT Symposium Japan, 2023
Chiplet integration technology, which has the potential to scalable expand capabilities by integrating many IC chips with different manufacturing processes, structures, and functions while maintaining the data transfer bandwidth between IC chips, is ...
Yasuhiro Morikawa
semanticscholar   +1 more source

Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 2023
Due to their enhanced piezoelectric coefficient, aluminum scandium nitride thin films have been a promising piezoelectric material for MEMS, in particular for RF filters applications.
Tamara Terzic, Nikolai Andrianov, Mustapha Chouiki, D. Solonenko, Annalisa De Pastina, Vladimir Pashchenko, Sarah Risquez   +6 more
semanticscholar   +1 more source

Chalcogenide Glass IR Artificial Compound Eyes Based on Femtosecond Laser Microfabrication

Advanced Materials & Technologies, 2022
The compact and lightweight infrared (IR) optics devices are highly demanded in booming applications. However, fabrication of IR optics devices with high efficiency is still technically challenging, especially artificial compound eyes (ACE) with low ...
Shaokun Wang, Fan Zhang, Q. Yang, Minjing Li, Xun Hou, F. Chen   +5 more
semanticscholar   +1 more source

Study of Micro- and Nanopatterned Aluminum Surfaces Using Different Microfabrication Processes for Water Management.

Langmuir, 2022
Superhydrophobic surfaces demonstrate extreme water-repellence, promoting drop-wise over film-wise condensation, increasing liquid mobility, and reducing thermal resistance for heat-exchanger applications.
Kirill Misiiuk, S. Lowrey, R. Blaikie, Josselin Juras, A. Sommers   +4 more
semanticscholar   +1 more source

Wafer-scale microfabrication of flexible organic electrochemical transistors

Flexible and Printed Electronics, 2022
We describe a photolithographic process to fabricate organic microdevices on flexible substrates that relies on photolithography and dry etching and is entirely compatible with standard cleanroom wafer processing equipment.
Quentin Thiburce, N. Melosh, A. Salleo
semanticscholar   +1 more source

Synergistic precision microfabrication enabling high‐performance multiplexed ceramic MEMS gas sensor arrays with pulse temperature modulation functionality

FlexMat
Gas sensing in complex environments requires advanced technologies that overcome the limitations of traditional semiconductor, electrochemical, and optical sensors.
Yuxin Zhao, Jianxiu Guo, Ming Lei, Heng Yang, Hongze Jiang, Juan Wang, Shunping Zhang   +6 more
semanticscholar   +1 more source

Near-vertical plasma-free HCl gas etching on (011) β-Ga2O3

Japanese Journal of Applied Physics
We investigated non-plasma HCl-gas etching properties on (011) β-Ga2O3, which is an attracting surface orientation allowing pit-free homoepitaxy. The etching occurred selectively in window regions of a patterned SiO2 mask, and resulting side-etched ...
Takayoshi Oshima, Yuichi Oshima
semanticscholar   +1 more source

Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring

Journal of Vacuum Science & Technology B
Reactive ion etching and reactive ion beam etching are widely used processes in the semiconductor industry but face challenges due to their high cost, energy demands, and maintenance complexity. Femtosecond laser micromachining has emerged as a versatile
Lukáš Šilhan, J. A. Arregi, Tomáš Plichta, Ondřej Vaculík, Jan Novotný, M. Šerý   +5 more
semanticscholar   +1 more source

Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devices

Journal of Micromechanics and Microengineering
This paper presents a wafer-scale silicon microfabrication technology for the sub-terahertz (sub-THz) waveguide device mass production. Based on the effective scheme, a WR-5 (140–220 GHz) straight rectangular waveguide and a WR-2.8 (260–400 GHz ...
Xinghai Zhao, Peng Wu, Fei Liu
semanticscholar   +1 more source

Fundamentals of Microfabrication

, 2002
Road Map .- Lithography .- Pattern Transfer: Dry Etching, Deposition, and Doping .- Wet Bulk Micromachining .- Dry Bulk Micromachining .- Surface Micromachining .- LIGA .- Alternative Micromachining Technologies .- Electronics Used with Micromachined ...
M. Madou
semanticscholar   +1 more source