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4039. Microfabrication in LiNbO3 by ion-bombardment-enhanced etching. (USA)
Vacuum, 1979openaire +1 more source
Microfabrication of a Diffractive Microlens Array on n‐GaAs by an Efficient Electrochemical Method
Advanced Materials, 2007exaly
Microfabrication and evaluation of diffractive optical filters prepared by reactive sputter etching
Vacuum, 1980openaire +1 more source

